A study on controllable aluminium doped zinc oxide patterning by chemical etching for MEMS application
This present work reports on the study of controllable aluminium doped zinc oxide (AZO) patterning by chemical etching for MEMS application. The AZO thin film was prepared by RF magnetron sputtering as it is capable of producing uniform thin film at high deposition rates. X-Ray diffraction (XRD) and...
| Main Authors: | , , , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English English English |
| Published: |
Springer Berlin Heidelberg
2017
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/49259/ http://irep.iium.edu.my/49259/ http://irep.iium.edu.my/49259/ http://irep.iium.edu.my/49259/1/Microsystems_2016.pdf http://irep.iium.edu.my/49259/9/49259_A%20study%20on%20controllable%20aluminium_scopus.pdf http://irep.iium.edu.my/49259/14/49259_A%20study%20on%20controllable%20aluminium%20doped_article.pdf |
Internet
http://irep.iium.edu.my/49259/http://irep.iium.edu.my/49259/
http://irep.iium.edu.my/49259/
http://irep.iium.edu.my/49259/1/Microsystems_2016.pdf
http://irep.iium.edu.my/49259/9/49259_A%20study%20on%20controllable%20aluminium_scopus.pdf
http://irep.iium.edu.my/49259/14/49259_A%20study%20on%20controllable%20aluminium%20doped_article.pdf