A study on controllable aluminium doped zinc oxide patterning by chemical etching for MEMS application

by Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin, A. Malik, Noreha, Othman, Raihan, Alam, A. H. M. Zahirul, Khan, Sheroz, Mortada, Ossama, Crunteanu, Aurelian, Chatras, Matthieu, Orlianges, Jean Christophe, Blondy, Pierre
Published 2017