Characterizations of cupric oxide thin films on glass and silicon substrates by radio frequency magnetron sputtering
Cupric oxide (CuO) thin films were prepared on a glass and silicon (Si) substrates by radio frequency magnetron sputtering system. The structural, optical and electrical properties of CuO films were characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), Fourier transform infrared s...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Universiti Kebangsaan Malaysia
2014
|
| Online Access: | http://journalarticle.ukm.my/7057/ http://journalarticle.ukm.my/7057/ http://journalarticle.ukm.my/7057/1/16_P.K._Ooi.pdf |