Fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application

In principle, adsorption of biological molecules on a functionalized surface of a microfabricated cantilever will cause a surface stress and consequently the cantilever bending. In this work, four different type of polysilicon-based piezoresistive microcantilever sensors were designed to increase...

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Main Authors:	Nina Korlina Madzhi, Anuar Ahmad, Balkish Natra, Mastura Sidek, Lee, Yoot Khuan
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2011
Online Access:	http://journalarticle.ukm.my/2451/ http://journalarticle.ukm.my/2451/ http://journalarticle.ukm.my/2451/1/16_Nina.pdf

id	ukm-2451
recordtype	eprints
spelling	ukm-24512016-12-14T06:31:39Z http://journalarticle.ukm.my/2451/ Fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application Nina Korlina Madzhi, Anuar Ahmad, Balkish Natra, Mastura Sidek, Lee, Yoot Khuan In principle, adsorption of biological molecules on a functionalized surface of a microfabricated cantilever will cause a surface stress and consequently the cantilever bending. In this work, four different type of polysilicon-based piezoresistive microcantilever sensors were designed to increase the sensitivity of the microcantilevers sensor because the forces involved is very small. The design and optimization was performed by using finite element analysis to maximize the relative resistance changes of the piezoresistors as a function of the cantilever vertical displacements. The resistivity of the piezoresistivity microcantilevers was analyzed before and after dicing process. The maximum resistance changes were systematically investigated by varying the piezoresistor length. The results show that although the thickness of piezoresistor was the same at 0.5 μm the resistance value was varied. Universiti Kebangsaan Malaysia 2011-01 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/2451/1/16_Nina.pdf Nina Korlina Madzhi, and Anuar Ahmad, and Balkish Natra, and Mastura Sidek, and Lee, Yoot Khuan (2011) Fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application. Sains Malaysiana, 40 (1). pp. 71-74. ISSN 0126-6039 http://www.ukm.my/jsm/
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Kebangasaan Malaysia
building	UKM Institutional Repository
collection	Online Access
language	English
description	In principle, adsorption of biological molecules on a functionalized surface of a microfabricated cantilever will cause a surface stress and consequently the cantilever bending. In this work, four different type of polysilicon-based piezoresistive microcantilever sensors were designed to increase the sensitivity of the microcantilevers sensor because the forces involved is very small. The design and optimization was performed by using finite element analysis to maximize the relative resistance changes of the piezoresistors as a function of the cantilever vertical displacements. The resistivity of the piezoresistivity microcantilevers was analyzed before and after dicing process. The maximum resistance changes were systematically investigated by varying the piezoresistor length. The results show that although the thickness of piezoresistor was the same at 0.5 μm the resistance value was varied.
format	Article
author	Nina Korlina Madzhi, Anuar Ahmad, Balkish Natra, Mastura Sidek, Lee, Yoot Khuan
spellingShingle	Nina Korlina Madzhi, Anuar Ahmad, Balkish Natra, Mastura Sidek, Lee, Yoot Khuan Fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application
author_facet	Nina Korlina Madzhi, Anuar Ahmad, Balkish Natra, Mastura Sidek, Lee, Yoot Khuan
author_sort	Nina Korlina Madzhi,
title	Fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application
title_short	Fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application
title_full	Fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application
title_fullStr	Fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application
title_full_unstemmed	Fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application
title_sort	fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application
publisher	Universiti Kebangsaan Malaysia
publishDate	2011
url	http://journalarticle.ukm.my/2451/ http://journalarticle.ukm.my/2451/ http://journalarticle.ukm.my/2451/1/16_Nina.pdf
first_indexed	2023-09-18T19:36:06Z
last_indexed	2023-09-18T19:36:06Z
_version_	1777405281256341504

Fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application

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