Fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application
In principle, adsorption of biological molecules on a functionalized surface of a microfabricated cantilever will cause a surface stress and consequently the cantilever bending. In this work, four different type of polysilicon-based piezoresistive microcantilever sensors were designed to increase...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Kebangsaan Malaysia
2011
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| Online Access: | http://journalarticle.ukm.my/2451/ http://journalarticle.ukm.my/2451/ http://journalarticle.ukm.my/2451/1/16_Nina.pdf |