Fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application
In principle, adsorption of biological molecules on a functionalized surface of a microfabricated cantilever will cause a surface stress and consequently the cantilever bending. In this work, four different type of polysilicon-based piezoresistive microcantilever sensors were designed to increase...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Kebangsaan Malaysia
2011
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| Online Access: | http://journalarticle.ukm.my/2451/ http://journalarticle.ukm.my/2451/ http://journalarticle.ukm.my/2451/1/16_Nina.pdf |
| Summary: | In principle, adsorption of biological molecules on a functionalized surface of a microfabricated cantilever will cause a
surface stress and consequently the cantilever bending. In this work, four different type of polysilicon-based piezoresistive
microcantilever sensors were designed to increase the sensitivity of the microcantilevers sensor because the forces
involved is very small. The design and optimization was performed by using finite element analysis to maximize the
relative resistance changes of the piezoresistors as a function of the cantilever vertical displacements. The resistivity of
the piezoresistivity microcantilevers was analyzed before and after dicing process. The maximum resistance changes
were systematically investigated by varying the piezoresistor length. The results show that although the thickness of
piezoresistor was the same at 0.5 μm the resistance value was varied. |
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