Design and Simulation of MEMS Hemholtz Resonator for Acoustic Energy Harvester

An acoustic energy harvester using Helmholtz resonator with piezoelectric circular diaphragm has been studied using COMSOL Multiphysics 5.1. In this paper, multiple designs considerations for MEMS Helmholtz resonator and piezoelectric circular diaphragm including the length and radius of the tube, t...

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Bibliographic Details
Main Authors: Ab Rahim, Rosminazuin, Johari, Muhammad Jabrullah
Format: Conference or Workshop Item
Language:English
Published: IEEE 2016
Subjects:
Online Access:http://irep.iium.edu.my/55745/
http://irep.iium.edu.my/55745/
http://irep.iium.edu.my/55745/
http://irep.iium.edu.my/55745/1/IEEE%20Published%20Jabrullah%20ICCCE2016.pdf