Tracking control of a nanopositioner using complementary sensors
Piezoelectric tube actuators are widely used in atomic force and scanning tunneling microscopy (STM) for nanoscale positioning. There has been a consistent effort to increase the scan speed of these actuators using feedback control techniques. A feedback controller requires a measurement of the scan...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institute of Electrical and Electronics Engineers (IEEE)
2009
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/5210/ http://irep.iium.edu.my/5210/ http://irep.iium.edu.my/5210/ http://irep.iium.edu.my/5210/1/Tracking_Control_of_a_Nanopositioner_Using_Complementary_Sensors.pdf |