Design and analysis of a low-voltage electrostatic actuated RF CMOS-MEMS switch

Design and analysis of a low-voltage electrostatic actuated RF CMOS-MEMS switch

This paper presents the design and analysis of a radio frequency (RF) micro-electromechanical system (MEMS) switch with low actuation voltage using MIMOS 0.35μm complementary metal oxide semiconductor (CMOS) process. The advantage of this RF MEMS switch is very low actuation voltage design which is...

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Main Authors: Ma, Li Ya, Nordin, Anis Nurashikin, Soin, Norhayati
Format: Conference or Workshop Item
Language:English
Published: 2013
Subjects:
TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:http://irep.iium.edu.my/46633/
http://irep.iium.edu.my/46633/
http://irep.iium.edu.my/46633/1/C_-_2013_-_Design_and_Analysis_of_a_Low-Voltage_Electrostatic_Actuated_RF_CMOS-MEMS_Switch.pdf
id iium-46633
recordtype eprints
spelling iium-466332016-07-15T07:39:26Z http://irep.iium.edu.my/46633/ Design and analysis of a low-voltage electrostatic actuated RF CMOS-MEMS switch Ma, Li Ya Nordin, Anis Nurashikin Soin, Norhayati TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices This paper presents the design and analysis of a radio frequency (RF) micro-electromechanical system (MEMS) switch with low actuation voltage using MIMOS 0.35μm complementary metal oxide semiconductor (CMOS) process. The advantage of this RF MEMS switch is very low actuation voltage design which is compatible with other CMOS circuit without employing a separate on-chip voltage source or charge pump unit. Moreover, using CMOS technology to design can highly simplify the fabrication process, reduce the cost and improve the device performance. The RF MEMS switch is a capacitive shunt- connection type device which uses four folded beams to support a big membrane above the signal transmission line. The pull-in voltage, von Mises stress distribution and vertical displacement of the membrane, up-state and down-state capacitances, as well as the switch impedance is calculated and analyzed by finite element modelling (FEM) simulation. 2013-09 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/46633/1/C_-_2013_-_Design_and_Analysis_of_a_Low-Voltage_Electrostatic_Actuated_RF_CMOS-MEMS_Switch.pdf Ma, Li Ya and Nordin, Anis Nurashikin and Soin, Norhayati (2013) Design and analysis of a low-voltage electrostatic actuated RF CMOS-MEMS switch. In: 2013 IEEE Regional Symposium on Micro and Nanoelectronics (RSM), 25-27 September 2013, Langkawi, Malaysia. http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6706468
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
spellingShingle TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Ma, Li Ya
Nordin, Anis Nurashikin
Soin, Norhayati
Design and analysis of a low-voltage electrostatic actuated RF CMOS-MEMS switch
description This paper presents the design and analysis of a radio frequency (RF) micro-electromechanical system (MEMS) switch with low actuation voltage using MIMOS 0.35μm complementary metal oxide semiconductor (CMOS) process. The advantage of this RF MEMS switch is very low actuation voltage design which is compatible with other CMOS circuit without employing a separate on-chip voltage source or charge pump unit. Moreover, using CMOS technology to design can highly simplify the fabrication process, reduce the cost and improve the device performance. The RF MEMS switch is a capacitive shunt- connection type device which uses four folded beams to support a big membrane above the signal transmission line. The pull-in voltage, von Mises stress distribution and vertical displacement of the membrane, up-state and down-state capacitances, as well as the switch impedance is calculated and analyzed by finite element modelling (FEM) simulation.
format Conference or Workshop Item
author Ma, Li Ya
Nordin, Anis Nurashikin
Soin, Norhayati
author_facet Ma, Li Ya
Nordin, Anis Nurashikin
Soin, Norhayati
author_sort Ma, Li Ya
title Design and analysis of a low-voltage electrostatic actuated RF CMOS-MEMS switch
title_short Design and analysis of a low-voltage electrostatic actuated RF CMOS-MEMS switch
title_full Design and analysis of a low-voltage electrostatic actuated RF CMOS-MEMS switch
title_fullStr Design and analysis of a low-voltage electrostatic actuated RF CMOS-MEMS switch
title_full_unstemmed Design and analysis of a low-voltage electrostatic actuated RF CMOS-MEMS switch
title_sort design and analysis of a low-voltage electrostatic actuated rf cmos-mems switch
publishDate 2013
url http://irep.iium.edu.my/46633/
http://irep.iium.edu.my/46633/
http://irep.iium.edu.my/46633/1/C_-_2013_-_Design_and_Analysis_of_a_Low-Voltage_Electrostatic_Actuated_RF_CMOS-MEMS_Switch.pdf
first_indexed 2023-09-18T21:06:23Z
last_indexed 2023-09-18T21:06:23Z
_version_ 1777410960827351040

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