Design and analysis of a low-voltage electrostatic actuated RF CMOS-MEMS switch
This paper presents the design and analysis of a radio frequency (RF) micro-electromechanical system (MEMS) switch with low actuation voltage using MIMOS 0.35μm complementary metal oxide semiconductor (CMOS) process. The advantage of this RF MEMS switch is very low actuation voltage design which is...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2013
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/46633/ http://irep.iium.edu.my/46633/ http://irep.iium.edu.my/46633/1/C_-_2013_-_Design_and_Analysis_of_a_Low-Voltage_Electrostatic_Actuated_RF_CMOS-MEMS_Switch.pdf |