Diagonal control design for atomic force microscope piezoelectric tube nanopositioners

Atomic Force Microscopes (AFM) are used for generating surface topography of samples at micro to atomic resolutions. Many commercial AFMs use piezoelectric tube nanopositioners for scanning. Scanning rates of these microscopes are hampered by the presence of low frequency resonant modes. When inadve...

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Main Authors:	Bhikkaji, Bharath, Yong, Yuen Kuan, Mahmood, Iskandar Al-Thani, Moheimani, S.O. Reza
Format:	Article
Language:	English
Published:	American Institute of Physics (AIP) 2013
Subjects:	Q Science (General) TJ212 Control engineering
Online Access:	http://irep.iium.edu.my/29069/ http://irep.iium.edu.my/29069/ http://irep.iium.edu.my/29069/1/Journal%23_RSI_Diagonal_control_design_for_atomic_force_microscope_piezoelectric_tube_nanopositioners.pdf

id	iium-29069
recordtype	eprints
spelling	iium-290692013-04-17T08:49:45Z http://irep.iium.edu.my/29069/ Diagonal control design for atomic force microscope piezoelectric tube nanopositioners Bhikkaji, Bharath Yong, Yuen Kuan Mahmood, Iskandar Al-Thani Moheimani, S.O. Reza Q Science (General) TJ212 Control engineering Atomic Force Microscopes (AFM) are used for generating surface topography of samples at micro to atomic resolutions. Many commercial AFMs use piezoelectric tube nanopositioners for scanning. Scanning rates of these microscopes are hampered by the presence of low frequency resonant modes. When inadvertently excited, these modes lead to high amplitude mechanical vibrations causing the loss of accuracy, while scanning, and eventually to break down of the tube. Feedback control has been used to damp these resonant modes. Thereby, enabling higher scanning rates. Here, a multivariable controller is designed to damp the first resonant mode along both the x and y axis. Exploiting the inherent symmetry in the piezoelectric tube, the multivariable control design problem is recast as independent single-input single-output (SISO) designs. This in conjunction with integral resonant control is used for damping the first resonant mode. American Institute of Physics (AIP) 2013-02-12 Article PeerReviewed application/pdf en http://irep.iium.edu.my/29069/1/Journal%23_RSI_Diagonal_control_design_for_atomic_force_microscope_piezoelectric_tube_nanopositioners.pdf Bhikkaji, Bharath and Yong, Yuen Kuan and Mahmood, Iskandar Al-Thani and Moheimani, S.O. Reza (2013) Diagonal control design for atomic force microscope piezoelectric tube nanopositioners. Review of Scientific Instruments, 84 (2). 023705 (1)-023705 (8). ISSN 1089-7623 (O), 0034-6748 (P) http://rsi.aip.org/resource/1/rsinak/v84/i2/p023705_s1?isAuthorized=no
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	Q Science (General) TJ212 Control engineering
spellingShingle	Q Science (General) TJ212 Control engineering Bhikkaji, Bharath Yong, Yuen Kuan Mahmood, Iskandar Al-Thani Moheimani, S.O. Reza Diagonal control design for atomic force microscope piezoelectric tube nanopositioners
description	Atomic Force Microscopes (AFM) are used for generating surface topography of samples at micro to atomic resolutions. Many commercial AFMs use piezoelectric tube nanopositioners for scanning. Scanning rates of these microscopes are hampered by the presence of low frequency resonant modes. When inadvertently excited, these modes lead to high amplitude mechanical vibrations causing the loss of accuracy, while scanning, and eventually to break down of the tube. Feedback control has been used to damp these resonant modes. Thereby, enabling higher scanning rates. Here, a multivariable controller is designed to damp the first resonant mode along both the x and y axis. Exploiting the inherent symmetry in the piezoelectric tube, the multivariable control design problem is recast as independent single-input single-output (SISO) designs. This in conjunction with integral resonant control is used for damping the first resonant mode.
format	Article
author	Bhikkaji, Bharath Yong, Yuen Kuan Mahmood, Iskandar Al-Thani Moheimani, S.O. Reza
author_facet	Bhikkaji, Bharath Yong, Yuen Kuan Mahmood, Iskandar Al-Thani Moheimani, S.O. Reza
author_sort	Bhikkaji, Bharath
title	Diagonal control design for atomic force microscope piezoelectric tube nanopositioners
title_short	Diagonal control design for atomic force microscope piezoelectric tube nanopositioners
title_full	Diagonal control design for atomic force microscope piezoelectric tube nanopositioners
title_fullStr	Diagonal control design for atomic force microscope piezoelectric tube nanopositioners
title_full_unstemmed	Diagonal control design for atomic force microscope piezoelectric tube nanopositioners
title_sort	diagonal control design for atomic force microscope piezoelectric tube nanopositioners
publisher	American Institute of Physics (AIP)
publishDate	2013
url	http://irep.iium.edu.my/29069/ http://irep.iium.edu.my/29069/ http://irep.iium.edu.my/29069/1/Journal%23_RSI_Diagonal_control_design_for_atomic_force_microscope_piezoelectric_tube_nanopositioners.pdf
first_indexed	2023-09-18T20:42:41Z
last_indexed	2023-09-18T20:42:41Z
_version_	1777409469849796608

Diagonal control design for atomic force microscope piezoelectric tube nanopositioners

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