Diagonal control design for atomic force microscope piezoelectric tube nanopositioners
Atomic Force Microscopes (AFM) are used for generating surface topography of samples at micro to atomic resolutions. Many commercial AFMs use piezoelectric tube nanopositioners for scanning. Scanning rates of these microscopes are hampered by the presence of low frequency resonant modes. When inadve...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
American Institute of Physics (AIP)
2013
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/29069/ http://irep.iium.edu.my/29069/ http://irep.iium.edu.my/29069/1/Journal%23_RSI_Diagonal_control_design_for_atomic_force_microscope_piezoelectric_tube_nanopositioners.pdf |