Fabrication of three dimensional micro-components – A review
Micro-components have become increasingly important to meet the demand of miniaturization and have a wide variety of applications in the field of micro-electronics, opto-electronics and microelectromechanical systems. Lithography, electron beam machining (EBM), laser beam machining (LBM), focused io...
| Main Authors: | , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2000
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27307/ http://irep.iium.edu.my/27307/1/071_6th_APM_IEB_2000_418-427.pdf |
| Summary: | Micro-components have become increasingly important to meet the demand of miniaturization and have a wide variety of applications in the field of micro-electronics, opto-electronics and microelectromechanical systems. Lithography, electron beam machining (EBM), laser beam machining (LBM), focused ion beam (FIB) machining are mostly being used for the machining of two-dimensional (2D) and pseudo three dimensional (3D) micro-components. But it was more difficult to fabricate 3D micro-components with curved surfaces by these processes. In the recent years, LIGA (Lithography, Electroplating and Molding) technique has evolved as a promising method for mass fabrication of 3D micro-components at high expenses and investment. This paper reviews the available fabrication processes for 2D and 3D micro-components. It covers the fundamentals, applications and limitations of each process. |
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