Fabrication of three dimensional micro-components – A review
Micro-components have become increasingly important to meet the demand of miniaturization and have a wide variety of applications in the field of micro-electronics, opto-electronics and microelectromechanical systems. Lithography, electron beam machining (EBM), laser beam machining (LBM), focused io...
| Main Authors: | , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2000
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27307/ http://irep.iium.edu.my/27307/1/071_6th_APM_IEB_2000_418-427.pdf |