Application of focused ion beam micromachining: a review

Fabrication of micro and nanoscale components are in high demand for various applications in diversified fields that include automotive, electronics, communication and medicine. Focused ion beam (FIB) machining is one of the techniques for microfabrication of micro devices. This paper presents a...

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Main Authors:	Rahman Azmil, Nur Atiqah, Jaafar, Israd Hakim, Ali, Mohammad Yeakub, Asfana, Banu
Format:	Article
Language:	English
Published:	Trans Tech Publications, Switzerland 2012
Subjects:	TS Manufactures
Online Access:	http://irep.iium.edu.my/27010/ http://irep.iium.edu.my/27010/ http://irep.iium.edu.my/27010/ http://irep.iium.edu.my/27010/1/AMR.576.507_FIB_Atiqah.pdf

id	iium-27010
recordtype	eprints
spelling	iium-270102015-10-21T23:09:49Z http://irep.iium.edu.my/27010/ Application of focused ion beam micromachining: a review Rahman Azmil, Nur Atiqah Jaafar, Israd Hakim Ali, Mohammad Yeakub Asfana, Banu TS Manufactures Fabrication of micro and nanoscale components are in high demand for various applications in diversified fields that include automotive, electronics, communication and medicine. Focused ion beam (FIB) machining is one of the techniques for microfabrication of micro devices. This paper presents a review of FIB machining technology that include its parameter, responses, its important component systems, as well as the fundamentals of imaging, milling (etching) and deposition techniques. The application of FIB in micromachining is also presented. Trans Tech Publications, Switzerland 2012-10-08 Article PeerReviewed application/pdf en http://irep.iium.edu.my/27010/1/AMR.576.507_FIB_Atiqah.pdf Rahman Azmil, Nur Atiqah and Jaafar, Israd Hakim and Ali, Mohammad Yeakub and Asfana, Banu (2012) Application of focused ion beam micromachining: a review. Advanced Materials Research, 576. pp. 507-510. ISSN 1022-6680 http://www.scientific.net/AMR.576.507 10.4028/www.scientific.net/AMR.576.507
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TS Manufactures
spellingShingle	TS Manufactures Rahman Azmil, Nur Atiqah Jaafar, Israd Hakim Ali, Mohammad Yeakub Asfana, Banu Application of focused ion beam micromachining: a review
description	Fabrication of micro and nanoscale components are in high demand for various applications in diversified fields that include automotive, electronics, communication and medicine. Focused ion beam (FIB) machining is one of the techniques for microfabrication of micro devices. This paper presents a review of FIB machining technology that include its parameter, responses, its important component systems, as well as the fundamentals of imaging, milling (etching) and deposition techniques. The application of FIB in micromachining is also presented.
format	Article
author	Rahman Azmil, Nur Atiqah Jaafar, Israd Hakim Ali, Mohammad Yeakub Asfana, Banu
author_facet	Rahman Azmil, Nur Atiqah Jaafar, Israd Hakim Ali, Mohammad Yeakub Asfana, Banu
author_sort	Rahman Azmil, Nur Atiqah
title	Application of focused ion beam micromachining: a review
title_short	Application of focused ion beam micromachining: a review
title_full	Application of focused ion beam micromachining: a review
title_fullStr	Application of focused ion beam micromachining: a review
title_full_unstemmed	Application of focused ion beam micromachining: a review
title_sort	application of focused ion beam micromachining: a review
publisher	Trans Tech Publications, Switzerland
publishDate	2012
url	http://irep.iium.edu.my/27010/ http://irep.iium.edu.my/27010/ http://irep.iium.edu.my/27010/ http://irep.iium.edu.my/27010/1/AMR.576.507_FIB_Atiqah.pdf
first_indexed	2023-09-18T20:40:10Z
last_indexed	2023-09-18T20:40:10Z
_version_	1777409311478120448

Application of focused ion beam micromachining: a review

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