Application of focused ion beam micromachining: a review
Fabrication of micro and nanoscale components are in high demand for various applications in diversified fields that include automotive, electronics, communication and medicine. Focused ion beam (FIB) machining is one of the techniques for microfabrication of micro devices. This paper presents a...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Trans Tech Publications, Switzerland
2012
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27010/ http://irep.iium.edu.my/27010/ http://irep.iium.edu.my/27010/ http://irep.iium.edu.my/27010/1/AMR.576.507_FIB_Atiqah.pdf |
| Summary: | Fabrication of micro and nanoscale components are in high demand for various
applications in diversified fields that include automotive, electronics, communication and medicine.
Focused ion beam (FIB) machining is one of the techniques for microfabrication of micro devices.
This paper presents a review of FIB machining technology that include its parameter, responses, its
important component systems, as well as the fundamentals of imaging, milling (etching) and
deposition techniques. The application of FIB in micromachining is also presented. |
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