Efficient lot batching system for furnace operation

At a semiconductor foundry where a wide range of products are manufactured using the make-to-order model, it is important to optimize the lot batching in diffusion area since the loading size in most machines are in quantities of 100 to 150 wafers. This paper describes a real time dispatching system...

Full description

Bibliographic Details
Main Authors:	Ibrahim, Kader, Chik, Mohd Azizi, Nizam, Wan Shamsir, Nyioh, Li Fem, Za'bah, Nor Farahidah
Format:	Conference or Workshop Item
Language:	English
Published:	2003
Subjects:	TS Manufactures
Online Access:	http://irep.iium.edu.my/23353/ http://irep.iium.edu.my/23353/ http://irep.iium.edu.my/23353/1/Efficient_lot_batching_system_for_furnace_operation.pdf

id	iium-23353
recordtype	eprints
spelling	iium-233532013-09-09T04:23:48Z http://irep.iium.edu.my/23353/ Efficient lot batching system for furnace operation Ibrahim, Kader Chik, Mohd Azizi Nizam, Wan Shamsir Nyioh, Li Fem Za'bah, Nor Farahidah TS Manufactures At a semiconductor foundry where a wide range of products are manufactured using the make-to-order model, it is important to optimize the lot batching in diffusion area since the loading size in most machines are in quantities of 100 to 150 wafers. This paper describes a real time dispatching system that has been developed to reduce lot queue time in the furnace operations. Emphasis on-customer delivery date, bottleneck tool and batching behavior was given in rule building for the overall systems implementation in diffusion furnace operation. The main component of this project is the rule built considering queue time restriction between pre-clean and furnace operation, allowable waiting time to maximize the batch, queue time consideration to next process such as polysilicon deposition, furnaces due for scheduled maintenance, bottleneck tool idling, process cycle time versus lot priority considerations and etc. With the implementation of this system we are able to reduce manufacturing cost, increase tool utilization, reduce overall cycle-time and meet customer delivery dates. This implementation has resulted in much better material movement and has also made the manufacturing line more linear. 2003 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/23353/1/Efficient_lot_batching_system_for_furnace_operation.pdf Ibrahim, Kader and Chik, Mohd Azizi and Nizam, Wan Shamsir and Nyioh, Li Fem and Za'bah, Nor Farahidah (2003) Efficient lot batching system for furnace operation. In: Advanced Semiconductor Manufacturing Conference (2003 IEEEI/SEMI), 31 March-1 April 2003 , Munich, Germany. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1194515&tag=1
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TS Manufactures
spellingShingle	TS Manufactures Ibrahim, Kader Chik, Mohd Azizi Nizam, Wan Shamsir Nyioh, Li Fem Za'bah, Nor Farahidah Efficient lot batching system for furnace operation
description	At a semiconductor foundry where a wide range of products are manufactured using the make-to-order model, it is important to optimize the lot batching in diffusion area since the loading size in most machines are in quantities of 100 to 150 wafers. This paper describes a real time dispatching system that has been developed to reduce lot queue time in the furnace operations. Emphasis on-customer delivery date, bottleneck tool and batching behavior was given in rule building for the overall systems implementation in diffusion furnace operation. The main component of this project is the rule built considering queue time restriction between pre-clean and furnace operation, allowable waiting time to maximize the batch, queue time consideration to next process such as polysilicon deposition, furnaces due for scheduled maintenance, bottleneck tool idling, process cycle time versus lot priority considerations and etc. With the implementation of this system we are able to reduce manufacturing cost, increase tool utilization, reduce overall cycle-time and meet customer delivery dates. This implementation has resulted in much better material movement and has also made the manufacturing line more linear.
format	Conference or Workshop Item
author	Ibrahim, Kader Chik, Mohd Azizi Nizam, Wan Shamsir Nyioh, Li Fem Za'bah, Nor Farahidah
author_facet	Ibrahim, Kader Chik, Mohd Azizi Nizam, Wan Shamsir Nyioh, Li Fem Za'bah, Nor Farahidah
author_sort	Ibrahim, Kader
title	Efficient lot batching system for furnace operation
title_short	Efficient lot batching system for furnace operation
title_full	Efficient lot batching system for furnace operation
title_fullStr	Efficient lot batching system for furnace operation
title_full_unstemmed	Efficient lot batching system for furnace operation
title_sort	efficient lot batching system for furnace operation
publishDate	2003
url	http://irep.iium.edu.my/23353/ http://irep.iium.edu.my/23353/ http://irep.iium.edu.my/23353/1/Efficient_lot_batching_system_for_furnace_operation.pdf
first_indexed	2023-09-18T20:35:22Z
last_indexed	2023-09-18T20:35:22Z
_version_	1777409010083823616

Efficient lot batching system for furnace operation

Similar Items