Efficient lot batching system for furnace operation
At a semiconductor foundry where a wide range of products are manufactured using the make-to-order model, it is important to optimize the lot batching in diffusion area since the loading size in most machines are in quantities of 100 to 150 wafers. This paper describes a real time dispatching system...
| Main Authors: | , , , , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2003
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/23353/ http://irep.iium.edu.my/23353/ http://irep.iium.edu.my/23353/1/Efficient_lot_batching_system_for_furnace_operation.pdf |