MEMS biosensor with integrated impedance and mass-sensing capabilities

A biosensor device (1) providing an analysis platform for detecting cell growth, comprising of an aluminium nitride (AlN) base (2), a shear horizontal-surface acoustic wave (SH-SAW) resonator including an input transducer (4) and an output transducer (5) symmetrically positioned on the aluminum nitr...

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Bibliographic Details
Main Authors: Nordin, Anis Nurashikin, Voiculescu, Ioana, Ibrahimy, Muhammad Ibn, Mel, Maizirwan
Format: Patent
Language:English
Published: 2011
Subjects:
Online Access:http://irep.iium.edu.my/1922/
http://irep.iium.edu.my/1922/
http://irep.iium.edu.my/1922/
http://irep.iium.edu.my/1922/3/US7964144.pdf