An investigation of the mechanical behavior of a microswitch beam under thermal and electrostatic loading including cryogenic effect

Three dimensional multiphysics finite element analysis (FEA) was performed to investigate the static and dynamic responses of a micro-switch in harsh temperature environment. The temperature range for the analysis was from -60°C to 100°C. The investigated microswitch consists of a clamped-clamped be...

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Bibliographic Details
Main Authors: Faris, Waleed Fekry, Mohammed , H.M., Ng, Kok Heng
Format: Conference or Workshop Item
Language:English
Published: 2010
Subjects:
Online Access:http://irep.iium.edu.my/13426/
http://irep.iium.edu.my/13426/
http://irep.iium.edu.my/13426/1/An_Investigation_of_the_Mechanical_Behavior_of_a_Microswitch.pdf