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Sabar D. Hutagalung,
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Sabar D. Hutagalung,
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Sabar D. Hutagalung,
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Nanoscale patterning by AFM lithography and its application on the fabrication of silicon nanowire devices
by
Sabar
D
.
Hutagalung
,
Kam, Chung Lew
,
Darsono, Teguh
Published 2014
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