Showing 1 - 11 results of 11 for search '"photolithography"', query time: 0.02s Refine Results
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    “…). Fabrication steps and results obtained by using UV photolithography at 2μm gap and electron beam lithography…”
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    “… the utilization of bulk micromachining technology. Through a sequence of photolithography and etching processes…”
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    “… in this study was the photolithography process of patterning electrodes with 4 different dimensions of diaphragm…”
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    “… Rsoft Photonics CAD are presented. Fabrication steps and results obtained by using UV photolithography…”
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    “… the utilization of bulk micromachining technology. Through a sequence of photolithography and etching processes…”
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  8. 8
    by Ibrahim, Siti Noorjannah
    Published 2011
    “… insulator with back contact (SIBC) biochip platform, fabricated using photolithography technique…”
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    “… to photolithography and other micromachining technologies. The main advantage is that it can be used for direct…”
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