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2by Beh, Khi Khim“… to an opening study towards the development of a working biochip. The traditional photolithography process have…”
Published 2016
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3“…). Fabrication steps and results obtained by using UV photolithography at 2μm gap and electron beam lithography…”
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4“… the utilization of bulk micromachining technology. Through a sequence of photolithography and etching processes…”
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5by Haslinawati Mohd Mustapha, M.F. Mohd Razip Wee, Ahmad Rifqi Md Zain, Mohd Ambri Mohamed“… in this study was the photolithography process of patterning electrodes with 4 different dimensions of diaphragm…”
Published 2019
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6by Mohd Salleh, Mohd Hazimin, Wilson, Ross, Glidle, Andrew, Marc, Sorel, Cooper, Jonathan M“… Rsoft Photonics CAD are presented. Fabrication steps and results obtained by using UV photolithography…”
Published 2009
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7“… the utilization of bulk micromachining technology. Through a sequence of photolithography and etching processes…”
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8by Ibrahim, Siti Noorjannah“… insulator with back contact (SIBC) biochip platform, fabricated using photolithography technique…”
Published 2011
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9“… namely deposition of 3.78 m thickness of Al doped Zinc Oxide (AZO) thin film, photolithography and wet…”
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10“… to photolithography and other micromachining technologies. The main advantage is that it can be used for direct…”
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11by A.Aziz, Azman, Mohd Azmi, Mohd Azraie, Zulkifli, Muhammad Nubli, Nordin, Anis Nurashikin, Kamarul Bahrain, Azleena, Makmon, Fatihatul Zuriati, Badruzzaman, Nurul Azzurin, Sabdin, Suhaili“… to minimize the current fabrication process through elimination of the photolithography process. As a result…”
Published 2019
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