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Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study
by
Narayanamurthy, Vigneswaran
,
Lakshminarayanan, Sujatha
,
Yacin, S. Mohamed
,
Fahmi, Samsuri
Published 2017
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Fahmi, Samsuri
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Lakshminarayanan, Sujatha
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Yacin, S. Mohamed
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English
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