Improving Physical Properties of Nano Layered ITO Thin Films by using a Novel Oil Thermal Annealing

Indium tin oxide (ITO) thin film were deposited on glass substrates by RF sputtering technique, followed by two treatment techniques which are Oil thermal annealing (OTA) and Argon Gas. Atomic Force Microscopy (AFM) and X-ray diffraction were used to analysis the surface morphology and structure of...

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Main Authors:	Hegde, Gurumurthy, Mehdi, Qasim, Jinan B., Al-Dabbagh, Ahmed, Naser Mahmoud, Mohamad Ashry, Jusoh
Format:	Article
Published:	Landesmuseum Kärnten 2014
Subjects:	QC Physics
Online Access:	http://umpir.ump.edu.my/id/eprint/8135/ http://umpir.ump.edu.my/id/eprint/8135/

id	ump-8135
recordtype	eprints
spelling	ump-81352018-07-25T02:48:42Z http://umpir.ump.edu.my/id/eprint/8135/ Improving Physical Properties of Nano Layered ITO Thin Films by using a Novel Oil Thermal Annealing Hegde, Gurumurthy Mehdi, Qasim Jinan B., Al-Dabbagh Ahmed, Naser Mahmoud Mohamad Ashry, Jusoh QC Physics Indium tin oxide (ITO) thin film were deposited on glass substrates by RF sputtering technique, followed by two treatment techniques which are Oil thermal annealing (OTA) and Argon Gas. Atomic Force Microscopy (AFM) and X-ray diffraction were used to analysis the surface morphology and structure of ITO thin film. The structural, electrical and optical properties data for ITO films with thickness 150 nm obtained. After deposition, the samples have been annealed at 250 ºC by using oil and Argon gas. The optical properties after annealing by using a spectrophotometer show a high transparency between 81% and 95% in the visible spectrum. In addition, the sheet resistance of ITO film 9.65 k Ω / □ was significantly improved to 65 Ω / □ annealing time by using the OTA technique in comparison with 2.37 k Ω / □ under Argon gas at 10 minutes. Landesmuseum Kärnten 2014-05-05 Article PeerReviewed Hegde, Gurumurthy and Mehdi, Qasim and Jinan B., Al-Dabbagh and Ahmed, Naser Mahmoud and Mohamad Ashry, Jusoh (2014) Improving Physical Properties of Nano Layered ITO Thin Films by using a Novel Oil Thermal Annealing. Wulfenia Journal, 21 (5). pp. 20-28. ISSN 1561-882X http://www.multidisciplinarywulfenia.org/auto/index.php/archive/part/21/5/1/?currentVol=21&currentissue=5
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Malaysia Pahang
building	UMP Institutional Repository
collection	Online Access
topic	QC Physics
spellingShingle	QC Physics Hegde, Gurumurthy Mehdi, Qasim Jinan B., Al-Dabbagh Ahmed, Naser Mahmoud Mohamad Ashry, Jusoh Improving Physical Properties of Nano Layered ITO Thin Films by using a Novel Oil Thermal Annealing
description	Indium tin oxide (ITO) thin film were deposited on glass substrates by RF sputtering technique, followed by two treatment techniques which are Oil thermal annealing (OTA) and Argon Gas. Atomic Force Microscopy (AFM) and X-ray diffraction were used to analysis the surface morphology and structure of ITO thin film. The structural, electrical and optical properties data for ITO films with thickness 150 nm obtained. After deposition, the samples have been annealed at 250 ºC by using oil and Argon gas. The optical properties after annealing by using a spectrophotometer show a high transparency between 81% and 95% in the visible spectrum. In addition, the sheet resistance of ITO film 9.65 k Ω / □ was significantly improved to 65 Ω / □ annealing time by using the OTA technique in comparison with 2.37 k Ω / □ under Argon gas at 10 minutes.
format	Article
author	Hegde, Gurumurthy Mehdi, Qasim Jinan B., Al-Dabbagh Ahmed, Naser Mahmoud Mohamad Ashry, Jusoh
author_facet	Hegde, Gurumurthy Mehdi, Qasim Jinan B., Al-Dabbagh Ahmed, Naser Mahmoud Mohamad Ashry, Jusoh
author_sort	Hegde, Gurumurthy
title	Improving Physical Properties of Nano Layered ITO Thin Films by using a Novel Oil Thermal Annealing
title_short	Improving Physical Properties of Nano Layered ITO Thin Films by using a Novel Oil Thermal Annealing
title_full	Improving Physical Properties of Nano Layered ITO Thin Films by using a Novel Oil Thermal Annealing
title_fullStr	Improving Physical Properties of Nano Layered ITO Thin Films by using a Novel Oil Thermal Annealing
title_full_unstemmed	Improving Physical Properties of Nano Layered ITO Thin Films by using a Novel Oil Thermal Annealing
title_sort	improving physical properties of nano layered ito thin films by using a novel oil thermal annealing
publisher	Landesmuseum Kärnten
publishDate	2014
url	http://umpir.ump.edu.my/id/eprint/8135/ http://umpir.ump.edu.my/id/eprint/8135/
first_indexed	2023-09-18T22:05:26Z
last_indexed	2023-09-18T22:05:26Z
_version_	1777414676271857664

Improving Physical Properties of Nano Layered ITO Thin Films by using a Novel Oil Thermal Annealing

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