Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices

Indium zinc oxide (InZnO) thin films with thicknesses of 100 nm and 200 nm were deposited on glass plate by thermal evaporation technique. Fourier transform infrared spectra showed a strong metal-oxide bond. X-ray diffraction patterns revealed amorphous nature for as-deposited film whereas polycryst...

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Main Authors:	Sugumaran, Sathish, Mohd Faizal, Jamlos, Mohd Noor, Ahmad, Bellan, Chandar Shekar, Sivaraj, Manoj
Format:	Article
Published:	Elsevier 2016
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://umpir.ump.edu.my/id/eprint/6779/ http://umpir.ump.edu.my/id/eprint/6779/ http://umpir.ump.edu.my/id/eprint/6779/

id	ump-6779
recordtype	eprints
spelling	ump-67792016-06-16T01:16:34Z http://umpir.ump.edu.my/id/eprint/6779/ Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices Sugumaran, Sathish Mohd Faizal, Jamlos Mohd Noor, Ahmad Bellan, Chandar Shekar Sivaraj, Manoj TJ Mechanical engineering and machinery Indium zinc oxide (InZnO) thin films with thicknesses of 100 nm and 200 nm were deposited on glass plate by thermal evaporation technique. Fourier transform infrared spectra showed a strong metal-oxide bond. X-ray diffraction patterns revealed amorphous nature for as-deposited film whereas polycrystalline structure for annealed films. Scanning electron microscope images showed a uniform distribution of spherical shape grains. Grain size was found to be higher for 200 nm film than 100 nm film. The presence of elements (In, Zn and O) was confirmed from energy dispersive X-ray analysis. Photoluminescence study of 200 nm film showed a blue, blue-green and blue-yellow emission whereas 100 nm film showed a broad green and green-yellow emissions. Both 100 nm and 200 nm films showed good oxygen sensitivity from room temperature to 400 °C. The observed optical and sensor results indicated that the prepared InZnO films are highly potential for room temperature gas sensor and blue, green and yellow emissive opto-electronic devices Elsevier 2016 Article PeerReviewed Sugumaran, Sathish and Mohd Faizal, Jamlos and Mohd Noor, Ahmad and Bellan, Chandar Shekar and Sivaraj, Manoj (2016) Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices. Optical Materials, 58. pp. 342-352. ISSN 0925-3467 http://dx.doi.org/10.1016/j.optmat.2016.05.049 DOI: 10.1016/j.optmat.2016.05.049
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Malaysia Pahang
building	UMP Institutional Repository
collection	Online Access
topic	TJ Mechanical engineering and machinery
spellingShingle	TJ Mechanical engineering and machinery Sugumaran, Sathish Mohd Faizal, Jamlos Mohd Noor, Ahmad Bellan, Chandar Shekar Sivaraj, Manoj Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices
description	Indium zinc oxide (InZnO) thin films with thicknesses of 100 nm and 200 nm were deposited on glass plate by thermal evaporation technique. Fourier transform infrared spectra showed a strong metal-oxide bond. X-ray diffraction patterns revealed amorphous nature for as-deposited film whereas polycrystalline structure for annealed films. Scanning electron microscope images showed a uniform distribution of spherical shape grains. Grain size was found to be higher for 200 nm film than 100 nm film. The presence of elements (In, Zn and O) was confirmed from energy dispersive X-ray analysis. Photoluminescence study of 200 nm film showed a blue, blue-green and blue-yellow emission whereas 100 nm film showed a broad green and green-yellow emissions. Both 100 nm and 200 nm films showed good oxygen sensitivity from room temperature to 400 °C. The observed optical and sensor results indicated that the prepared InZnO films are highly potential for room temperature gas sensor and blue, green and yellow emissive opto-electronic devices
format	Article
author	Sugumaran, Sathish Mohd Faizal, Jamlos Mohd Noor, Ahmad Bellan, Chandar Shekar Sivaraj, Manoj
author_facet	Sugumaran, Sathish Mohd Faizal, Jamlos Mohd Noor, Ahmad Bellan, Chandar Shekar Sivaraj, Manoj
author_sort	Sugumaran, Sathish
title	Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices
title_short	Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices
title_full	Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices
title_fullStr	Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices
title_full_unstemmed	Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices
title_sort	thickness and annealing effects on thermally evaporated inzno thin films for gas sensors and blue, green and yellow emissive optical devices
publisher	Elsevier
publishDate	2016
url	http://umpir.ump.edu.my/id/eprint/6779/ http://umpir.ump.edu.my/id/eprint/6779/ http://umpir.ump.edu.my/id/eprint/6779/
first_indexed	2023-09-18T22:02:51Z
last_indexed	2023-09-18T22:02:51Z
_version_	1777414513716363264

Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices

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