Evolutionary Fuzzy ARTMAP Neural Networks for Classification of Semiconductor Defects
Wafer defect detection using an intelligent system is an approach of quality improvement in semiconductor manufacturing that aims to enhance its process stability, increase production capacity, and improve yields. Occasionally, only few records that indicate defective units are available and they ar...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2014
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| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/6190/ http://umpir.ump.edu.my/id/eprint/6190/ http://umpir.ump.edu.my/id/eprint/6190/ http://umpir.ump.edu.my/id/eprint/6190/1/Evolutionary_Fuzzy_ARTMAP_Neural_Networks_for_Classification_of_Semiconductor_Defects.pdf |