On Generation of Micro-Feature on Silicon with an Industrial Laser
Generation of a micro feature on mono-crystalline silicon surface using an industrial laser is presented. The main objective is to investigate the capability of the industrial laser, Nd:YAG, in generating a micro-feature on silicon surface. The unpolished silicon surface was irradiated with the Nd:Y...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Trans Tech Publications
2014
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| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/4586/ http://umpir.ump.edu.my/id/eprint/4586/ http://umpir.ump.edu.my/id/eprint/4586/ http://umpir.ump.edu.my/id/eprint/4586/1/On_generation_of_micro_feature_on_silicon_with_an_industrial_laser_Materials_science_forum_%282014%29.pdf |