Feasible laser parameters in fabrication of MEMS structures on silicon

Feasible laser parameters in fabrication of MEMS structures on silicon

The technique of making MEMS structures are kept improving which from old fashion with high cost machine to very advanced one to save time and labor cost. In this report, laser machining of silicon using ND:YAG is introduced. The main objectives are generating MEMS structures on silicon wafer by usi...

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Main Author: Yong, Chee Ping
Format: Undergraduates Project Papers
Language:English
Published: 2010
Subjects:
TJ Mechanical engineering and machinery
Online Access:http://umpir.ump.edu.my/id/eprint/1502/
http://umpir.ump.edu.my/id/eprint/1502/
http://umpir.ump.edu.my/id/eprint/1502/1/Yong%2C_Chee_Ping_%28_CD_5034_%29.pdf
id ump-1502
recordtype eprints
spelling ump-15022015-03-03T07:51:27Z http://umpir.ump.edu.my/id/eprint/1502/ Feasible laser parameters in fabrication of MEMS structures on silicon Yong, Chee Ping TJ Mechanical engineering and machinery The technique of making MEMS structures are kept improving which from old fashion with high cost machine to very advanced one to save time and labor cost. In this report, laser machining of silicon using ND:YAG is introduced. The main objectives are generating MEMS structures on silicon wafer by using laser micromachining and the effects of parameters of laser micromachining on silicon.STATISTICA is used to design and analyze the experiments. Two experimental sets: (1) laser processing with assist gas and (2)laser processing without assist gas were carried out. Basic feature of MEMS and micro spots were generated. The micro features were investigated under SEM. Experimental results were analyzed in STATISTICA. Analyzed results show that laser power is the most significant effect followed by pulse width and the assist gas on the micro feature size and particularly feature quality. It was found that laser processing without assist gas produce promising results. 2010-12 Undergraduates Project Papers NonPeerReviewed application/pdf en http://umpir.ump.edu.my/id/eprint/1502/1/Yong%2C_Chee_Ping_%28_CD_5034_%29.pdf Yong, Chee Ping (2010) Feasible laser parameters in fabrication of MEMS structures on silicon. Faculty of Mechanical Engineering, Universiti Malaysia Pahang. http://iportal.ump.edu.my/lib/item?id=chamo:52423&theme=UMP2
repository_type Digital Repository
institution_category Local University
institution Universiti Malaysia Pahang
building UMP Institutional Repository
collection Online Access
language English
topic TJ Mechanical engineering and machinery
spellingShingle TJ Mechanical engineering and machinery
Yong, Chee Ping
Feasible laser parameters in fabrication of MEMS structures on silicon
description The technique of making MEMS structures are kept improving which from old fashion with high cost machine to very advanced one to save time and labor cost. In this report, laser machining of silicon using ND:YAG is introduced. The main objectives are generating MEMS structures on silicon wafer by using laser micromachining and the effects of parameters of laser micromachining on silicon.STATISTICA is used to design and analyze the experiments. Two experimental sets: (1) laser processing with assist gas and (2)laser processing without assist gas were carried out. Basic feature of MEMS and micro spots were generated. The micro features were investigated under SEM. Experimental results were analyzed in STATISTICA. Analyzed results show that laser power is the most significant effect followed by pulse width and the assist gas on the micro feature size and particularly feature quality. It was found that laser processing without assist gas produce promising results.
format Undergraduates Project Papers
author Yong, Chee Ping
author_facet Yong, Chee Ping
author_sort Yong, Chee Ping
title Feasible laser parameters in fabrication of MEMS structures on silicon
title_short Feasible laser parameters in fabrication of MEMS structures on silicon
title_full Feasible laser parameters in fabrication of MEMS structures on silicon
title_fullStr Feasible laser parameters in fabrication of MEMS structures on silicon
title_full_unstemmed Feasible laser parameters in fabrication of MEMS structures on silicon
title_sort feasible laser parameters in fabrication of mems structures on silicon
publishDate 2010
url http://umpir.ump.edu.my/id/eprint/1502/
http://umpir.ump.edu.my/id/eprint/1502/
http://umpir.ump.edu.my/id/eprint/1502/1/Yong%2C_Chee_Ping_%28_CD_5034_%29.pdf
first_indexed 2023-09-18T21:54:41Z
last_indexed 2023-09-18T21:54:41Z
_version_ 1777414000291610624

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