Feasible laser parameter in fabrication of MEMS structure on PMMA
Micro electromechanical systems (MEMS) fabrication leads to new requirements in production technology as the demands of high performance, small size and low cost devices are increasing. This research was conducted using a solid state pulsed Nd:YAG laser machine with a 3-axis motion controller to gen...
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| Format: | Undergraduates Project Papers |
| Language: | English |
| Published: |
2010
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| Online Access: | http://umpir.ump.edu.my/id/eprint/1498/ http://umpir.ump.edu.my/id/eprint/1498/ http://umpir.ump.edu.my/id/eprint/1498/1/Simon_Hock_Hua_%28_CD_5065_%29.pdf |