Feasible laser parameter in fabrication of MEMS structure on PMMA

Feasible laser parameter in fabrication of MEMS structure on PMMA

Micro electromechanical systems (MEMS) fabrication leads to new requirements in production technology as the demands of high performance, small size and low cost devices are increasing. This research was conducted using a solid state pulsed Nd:YAG laser machine with a 3-axis motion controller to gen...

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Main Author: Loh, Simon Hock Hua
Format: Undergraduates Project Papers
Language:English
Published: 2010
Subjects:
TJ Mechanical engineering and machinery
Online Access:http://umpir.ump.edu.my/id/eprint/1498/
http://umpir.ump.edu.my/id/eprint/1498/
http://umpir.ump.edu.my/id/eprint/1498/1/Simon_Hock_Hua_%28_CD_5065_%29.pdf
id ump-1498
recordtype eprints
spelling ump-14982015-03-03T07:51:26Z http://umpir.ump.edu.my/id/eprint/1498/ Feasible laser parameter in fabrication of MEMS structure on PMMA Loh, Simon Hock Hua TJ Mechanical engineering and machinery Micro electromechanical systems (MEMS) fabrication leads to new requirements in production technology as the demands of high performance, small size and low cost devices are increasing. This research was conducted using a solid state pulsed Nd:YAG laser machine with a 3-axis motion controller to generate MEMS structure on PMMA. The MEMS structure generated on PMMA includes laser lines and laser spots. The effects of various laser parameters on the PMMA specimen were studied and measured under optical microscope before transferring the data to STATISTICA software for analysis. From the results, the feasible laser parameter combinations can be determined to generate the smallest possible micro feature on PMMA. Pulse energy and cutting speed from the process parameters show significant response to the line width for generation of laser lines geometry. As for the generation of laser spots geometry, pulse width from the process parameters significantly affects the diameter length of the spots. The usage of assist gas has generally decreases the laser spots diameter for generation of both micro-holes and line width for generation of micro-lines but it also causes inconsistency to the cutting quality of the laser machine. The feasible parameters for structuring laser lines (micro-channels) geometry without assist gas are found to be in the range of 40 – 90 mm/min for traverse speed and 0.01 - 0.02 J for pulse energy. On the other hand, the feasible parameters for laser lines geometry with assist gas are found to in the range of 80 - 120 mm/min for traverse speed and 0.01 – 0.02 J for pulse energy. As for structuring laser spots (micro-holes), the feasible parameters for generating laser spots geometry without assist gas are found to be in the range of 18 – 26 % for pulse height and 0.15 – 0.21 ms for pulse width. On the other hand, the feasible parameters for laser spots geometry with assist gas are found to be in the range of 24 – 36 % for pulse height and 0.15 – 0.20 ms for pulse width. 2010-12 Undergraduates Project Papers NonPeerReviewed application/pdf en http://umpir.ump.edu.my/id/eprint/1498/1/Simon_Hock_Hua_%28_CD_5065_%29.pdf Loh, Simon Hock Hua (2010) Feasible laser parameter in fabrication of MEMS structure on PMMA. Faculty of Mechanical Engineering, Universiti Malaysia Pahang. http://iportal.ump.edu.my/lib/item?id=chamo:52633&theme=UMP2
repository_type Digital Repository
institution_category Local University
institution Universiti Malaysia Pahang
building UMP Institutional Repository
collection Online Access
language English
topic TJ Mechanical engineering and machinery
spellingShingle TJ Mechanical engineering and machinery
Loh, Simon Hock Hua
Feasible laser parameter in fabrication of MEMS structure on PMMA
description Micro electromechanical systems (MEMS) fabrication leads to new requirements in production technology as the demands of high performance, small size and low cost devices are increasing. This research was conducted using a solid state pulsed Nd:YAG laser machine with a 3-axis motion controller to generate MEMS structure on PMMA. The MEMS structure generated on PMMA includes laser lines and laser spots. The effects of various laser parameters on the PMMA specimen were studied and measured under optical microscope before transferring the data to STATISTICA software for analysis. From the results, the feasible laser parameter combinations can be determined to generate the smallest possible micro feature on PMMA. Pulse energy and cutting speed from the process parameters show significant response to the line width for generation of laser lines geometry. As for the generation of laser spots geometry, pulse width from the process parameters significantly affects the diameter length of the spots. The usage of assist gas has generally decreases the laser spots diameter for generation of both micro-holes and line width for generation of micro-lines but it also causes inconsistency to the cutting quality of the laser machine. The feasible parameters for structuring laser lines (micro-channels) geometry without assist gas are found to be in the range of 40 – 90 mm/min for traverse speed and 0.01 - 0.02 J for pulse energy. On the other hand, the feasible parameters for laser lines geometry with assist gas are found to in the range of 80 - 120 mm/min for traverse speed and 0.01 – 0.02 J for pulse energy. As for structuring laser spots (micro-holes), the feasible parameters for generating laser spots geometry without assist gas are found to be in the range of 18 – 26 % for pulse height and 0.15 – 0.21 ms for pulse width. On the other hand, the feasible parameters for laser spots geometry with assist gas are found to be in the range of 24 – 36 % for pulse height and 0.15 – 0.20 ms for pulse width.
format Undergraduates Project Papers
author Loh, Simon Hock Hua
author_facet Loh, Simon Hock Hua
author_sort Loh, Simon Hock Hua
title Feasible laser parameter in fabrication of MEMS structure on PMMA
title_short Feasible laser parameter in fabrication of MEMS structure on PMMA
title_full Feasible laser parameter in fabrication of MEMS structure on PMMA
title_fullStr Feasible laser parameter in fabrication of MEMS structure on PMMA
title_full_unstemmed Feasible laser parameter in fabrication of MEMS structure on PMMA
title_sort feasible laser parameter in fabrication of mems structure on pmma
publishDate 2010
url http://umpir.ump.edu.my/id/eprint/1498/
http://umpir.ump.edu.my/id/eprint/1498/
http://umpir.ump.edu.my/id/eprint/1498/1/Simon_Hock_Hua_%28_CD_5065_%29.pdf
first_indexed 2023-09-18T21:54:41Z
last_indexed 2023-09-18T21:54:41Z
_version_ 1777413999700213760

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