Design of Electrostatic Comb Actuators based on Finite Element Method

Electrostatic comb actuators are commonly used to provide displacement-invariant force in micro electro-mechanical system (MEMS). Major application can be found in resonator, inertial sensor, accelerometer, and gyroscope. The size of the comb may be a few microns to millimeters. Principally, the ele...

Full description

Bibliographic Details
Main Authors:	Mon, Thet Thet, Z., Ghazalli, Asnul Hadi, Ahmad, Mohd Fazli, Ismail, Khairul Fikri, Muhammad
Format:	Conference or Workshop Item
Language:	English English
Published:	2010
Subjects:	T Technology (General) TJ Mechanical engineering and machinery
Online Access:	http://umpir.ump.edu.my/id/eprint/10463/ http://umpir.ump.edu.my/id/eprint/10463/ http://umpir.ump.edu.my/id/eprint/10463/ http://umpir.ump.edu.my/id/eprint/10463/1/fkm-2010-zakri-Design%20of%20electrostatic.pdf http://umpir.ump.edu.my/id/eprint/10463/7/fkm-2010-zakri-%20Design%20of%20Electrostatic.pdf

id	ump-10463
recordtype	eprints
spelling	ump-104632018-05-16T04:09:04Z http://umpir.ump.edu.my/id/eprint/10463/ Design of Electrostatic Comb Actuators based on Finite Element Method Mon, Thet Thet Z., Ghazalli Asnul Hadi, Ahmad Mohd Fazli, Ismail Khairul Fikri, Muhammad T Technology (General) TJ Mechanical engineering and machinery Electrostatic comb actuators are commonly used to provide displacement-invariant force in micro electro-mechanical system (MEMS). Major application can be found in resonator, inertial sensor, accelerometer, and gyroscope. The size of the comb may be a few microns to millimeters. Principally, the electrostatic force is produced in the comb structure due to potential difference between the electrodes, which is used to actuate the system attached to it. The higher forces are very often desirable for high sensitivity and performance. However to meet this demand, micro-scaled structures are very often fabricated on trial-error basis because of lack of well established fabrication method. In this situation, designing on a computer prior to the actual fabrication would be very helpful. Moreover, in a virtual device, parameters can be changed much more quickly than trial-and-error fabrication reducing the time to market and also the cost to develop a commercial device considerably. The aim of this paper is to present finite element modeling and analysis to design comb structure, and its limitation for realistic design. Design objective is to achieve higher actuation force. Since a computational model for design analysis at micro-scale based on FEM is never obsolete, this work will be useful for those who seek designing MEMS components in FEM as well as facilitate the MEMS industry to economically obtain feasible design parameters for micro-scaled devices. 2010-12-01 Conference or Workshop Item PeerReviewed application/pdf en http://umpir.ump.edu.my/id/eprint/10463/1/fkm-2010-zakri-Design%20of%20electrostatic.pdf application/pdf en http://umpir.ump.edu.my/id/eprint/10463/7/fkm-2010-zakri-%20Design%20of%20Electrostatic.pdf Mon, Thet Thet and Z., Ghazalli and Asnul Hadi, Ahmad and Mohd Fazli, Ismail and Khairul Fikri, Muhammad (2010) Design of Electrostatic Comb Actuators based on Finite Element Method. In: International Conference on Enabling Science and Nanotechnology (ESciNano 2010), 1-3 December 2010 , Kuala Lumpur. pp. 1-3.. http://dx.doi.org/10.1109/ESCINANO.2010.5700957 doi:10.1109/ESCINANO.2010.5700957
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Malaysia Pahang
building	UMP Institutional Repository
collection	Online Access
language	English English
topic	T Technology (General) TJ Mechanical engineering and machinery
spellingShingle	T Technology (General) TJ Mechanical engineering and machinery Mon, Thet Thet Z., Ghazalli Asnul Hadi, Ahmad Mohd Fazli, Ismail Khairul Fikri, Muhammad Design of Electrostatic Comb Actuators based on Finite Element Method
description	Electrostatic comb actuators are commonly used to provide displacement-invariant force in micro electro-mechanical system (MEMS). Major application can be found in resonator, inertial sensor, accelerometer, and gyroscope. The size of the comb may be a few microns to millimeters. Principally, the electrostatic force is produced in the comb structure due to potential difference between the electrodes, which is used to actuate the system attached to it. The higher forces are very often desirable for high sensitivity and performance. However to meet this demand, micro-scaled structures are very often fabricated on trial-error basis because of lack of well established fabrication method. In this situation, designing on a computer prior to the actual fabrication would be very helpful. Moreover, in a virtual device, parameters can be changed much more quickly than trial-and-error fabrication reducing the time to market and also the cost to develop a commercial device considerably. The aim of this paper is to present finite element modeling and analysis to design comb structure, and its limitation for realistic design. Design objective is to achieve higher actuation force. Since a computational model for design analysis at micro-scale based on FEM is never obsolete, this work will be useful for those who seek designing MEMS components in FEM as well as facilitate the MEMS industry to economically obtain feasible design parameters for micro-scaled devices.
format	Conference or Workshop Item
author	Mon, Thet Thet Z., Ghazalli Asnul Hadi, Ahmad Mohd Fazli, Ismail Khairul Fikri, Muhammad
author_facet	Mon, Thet Thet Z., Ghazalli Asnul Hadi, Ahmad Mohd Fazli, Ismail Khairul Fikri, Muhammad
author_sort	Mon, Thet Thet
title	Design of Electrostatic Comb Actuators based on Finite Element Method
title_short	Design of Electrostatic Comb Actuators based on Finite Element Method
title_full	Design of Electrostatic Comb Actuators based on Finite Element Method
title_fullStr	Design of Electrostatic Comb Actuators based on Finite Element Method
title_full_unstemmed	Design of Electrostatic Comb Actuators based on Finite Element Method
title_sort	design of electrostatic comb actuators based on finite element method
publishDate	2010
url	http://umpir.ump.edu.my/id/eprint/10463/ http://umpir.ump.edu.my/id/eprint/10463/ http://umpir.ump.edu.my/id/eprint/10463/ http://umpir.ump.edu.my/id/eprint/10463/1/fkm-2010-zakri-Design%20of%20electrostatic.pdf http://umpir.ump.edu.my/id/eprint/10463/7/fkm-2010-zakri-%20Design%20of%20Electrostatic.pdf
first_indexed	2023-09-18T22:10:05Z
last_indexed	2023-09-18T22:10:05Z
_version_	1777414969434832896

Design of Electrostatic Comb Actuators based on Finite Element Method

Similar Items