Structural properties of zinc oxide thin films deposited on various substrates
In this work, the structural properties of radio frequency sputtering-grown zinc oxide (ZnO) thin films on sapphire (Al2O3), gallium arsenide (GaAs) and n-type silicon (Si) substrates were characterized. Scanning electron microscopy was employed to study the surface morphology of the samples. X-ray...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Kebangsaan Malaysia
2014
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| Online Access: | http://journalarticle.ukm.my/7183/ http://journalarticle.ukm.my/7183/ http://journalarticle.ukm.my/7183/1/16_C.G._Ching.pdf |