MEMS very low capacitive pressure sensor based on CMOS process
The CMOS standard process with advantage of simplicity in term of design and fabrication process compatibility has triggered the invention of MEMS very low capacitive pressure sensor, (MEMS-VLCPS). In this paper the development of the whole structure of MEMS-VLCPS that involves the design simulation...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Kebangsaan Malaysia
2011
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| Online Access: | http://journalarticle.ukm.my/707/ http://journalarticle.ukm.my/707/ http://journalarticle.ukm.my/707/1/11_Muhammad_Ramdzan.pdf |