Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application

A comprehensive study on the SOG (Spin-on-Glass) based thin film insulating layer is presented. The SOG layer has been fabricated using simple MEMS technology which can play an important role as insulating layer of stack coupled microcoils. The fabrication process utilizes a simple, cost effective p...

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Main Authors:	Jumril Yunas, Burhanuddin Yeop Majlis, Azrul Azlan Hamzah, Badariah Bais
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2014
Online Access:	http://journalarticle.ukm.my/6860/ http://journalarticle.ukm.my/6860/ http://journalarticle.ukm.my/6860/1/18_Jumril_Yunas.pdf

id	ukm-6860
recordtype	eprints
spelling	ukm-68602016-12-14T06:42:24Z http://journalarticle.ukm.my/6860/ Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application Jumril Yunas, Burhanuddin Yeop Majlis, Azrul Azlan Hamzah, Badariah Bais, A comprehensive study on the SOG (Spin-on-Glass) based thin film insulating layer is presented. The SOG layer has been fabricated using simple MEMS technology which can play an important role as insulating layer of stack coupled microcoils. The fabrication process utilizes a simple, cost effective process technique as well as CMOS compatible resulting to a reproducible and good controlled process. It was observed that the spin speed and material preparation prior to the process affect to the thickness and surface quality of the layer. Through the annealing process at temperature 425oC in N2 atmospheric for 1 h, a 750 nm thin SOG layer with the surface roughness or the uniformity of about 1.5% can be achieved. Furthermore, the basic characteristics of the spiral coils, including the coupling characteristics and its parasitic capacitance were discussed in wide range of operating frequency. The results from this investigation showed a good prospect for the development of fully integrated planar magnetic field coupler and generator for sensing and actuating purposes. Universiti Kebangsaan Malaysia 2014-02 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/6860/1/18_Jumril_Yunas.pdf Jumril Yunas, and Burhanuddin Yeop Majlis, and Azrul Azlan Hamzah, and Badariah Bais, (2014) Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application. Sains Malaysiana, 43 (2). pp. 289-293. ISSN 0126-6039 http://www.ukm.my/jsm
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Kebangasaan Malaysia
building	UKM Institutional Repository
collection	Online Access
language	English
description	A comprehensive study on the SOG (Spin-on-Glass) based thin film insulating layer is presented. The SOG layer has been fabricated using simple MEMS technology which can play an important role as insulating layer of stack coupled microcoils. The fabrication process utilizes a simple, cost effective process technique as well as CMOS compatible resulting to a reproducible and good controlled process. It was observed that the spin speed and material preparation prior to the process affect to the thickness and surface quality of the layer. Through the annealing process at temperature 425oC in N2 atmospheric for 1 h, a 750 nm thin SOG layer with the surface roughness or the uniformity of about 1.5% can be achieved. Furthermore, the basic characteristics of the spiral coils, including the coupling characteristics and its parasitic capacitance were discussed in wide range of operating frequency. The results from this investigation showed a good prospect for the development of fully integrated planar magnetic field coupler and generator for sensing and actuating purposes.
format	Article
author	Jumril Yunas, Burhanuddin Yeop Majlis, Azrul Azlan Hamzah, Badariah Bais,
spellingShingle	Jumril Yunas, Burhanuddin Yeop Majlis, Azrul Azlan Hamzah, Badariah Bais, Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application
author_facet	Jumril Yunas, Burhanuddin Yeop Majlis, Azrul Azlan Hamzah, Badariah Bais,
author_sort	Jumril Yunas,
title	Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application
title_short	Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application
title_full	Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application
title_fullStr	Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application
title_full_unstemmed	Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application
title_sort	spin-on-glass (sog) based insulator of stack coupled microcoils for mems sensors and actuators application
publisher	Universiti Kebangsaan Malaysia
publishDate	2014
url	http://journalarticle.ukm.my/6860/ http://journalarticle.ukm.my/6860/ http://journalarticle.ukm.my/6860/1/18_Jumril_Yunas.pdf
first_indexed	2023-09-18T19:48:04Z
last_indexed	2023-09-18T19:48:04Z
_version_	1777406033673584640

Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application

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