Preparation of porous Si (100) for overgrown cubic layer: morphological investigation

A number of n-type Si (100) samples were prepared into porous structures via electrochemical etching process, using an electrolyte solution; HF and ethanol. The morphological properties of the samples were observed under scanning electron microscope measurement. The results showed that the pore dens...

Full description

Bibliographic Details
Main Authors:	M.E.A., Samsudin, M., Ikram Md Taib, N., Zainal, R., Radzali, S., Yaakob, Z., Hassan
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2013
Online Access:	http://journalarticle.ukm.my/6477/ http://journalarticle.ukm.my/6477/ http://journalarticle.ukm.my/6477/1/18_M.E.A._Samsudin.pdf

id	ukm-6477
recordtype	eprints
spelling	ukm-64772016-12-14T06:41:18Z http://journalarticle.ukm.my/6477/ Preparation of porous Si (100) for overgrown cubic layer: morphological investigation M.E.A., Samsudin M., Ikram Md Taib N., Zainal R., Radzali S., Yaakob Z., Hassan A number of n-type Si (100) samples were prepared into porous structures via electrochemical etching process, using an electrolyte solution; HF and ethanol. The morphological properties of the samples were observed under scanning electron microscope measurement. The results showed that the pore density, pore uniformity distribution and pore size of the porous Si samples increased with time of etching. In the next stage, H2O2 was introduced into the electrolyte solution in order to investigate its effect on the morphological properties of the porous Si. From the experiment, we found that H2O2 gave finer porous structure with highly symmetrical cubic shape on the surface. Besides, H2O2 promoted smoother surface of the pore walls. Hence, the results showed that such porous Si structure could be used as a better substrate for the subsequent layer, in particular for the growth of cubic material. Universiti Kebangsaan Malaysia 2013-09 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/6477/1/18_M.E.A._Samsudin.pdf M.E.A., Samsudin and M., Ikram Md Taib and N., Zainal and R., Radzali and S., Yaakob and Z., Hassan (2013) Preparation of porous Si (100) for overgrown cubic layer: morphological investigation. Sains Malaysiana, 42 (9). pp. 1333-1337. ISSN 0126-6039 http://www.ukm.my/jsm/
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Kebangasaan Malaysia
building	UKM Institutional Repository
collection	Online Access
language	English
description	A number of n-type Si (100) samples were prepared into porous structures via electrochemical etching process, using an electrolyte solution; HF and ethanol. The morphological properties of the samples were observed under scanning electron microscope measurement. The results showed that the pore density, pore uniformity distribution and pore size of the porous Si samples increased with time of etching. In the next stage, H2O2 was introduced into the electrolyte solution in order to investigate its effect on the morphological properties of the porous Si. From the experiment, we found that H2O2 gave finer porous structure with highly symmetrical cubic shape on the surface. Besides, H2O2 promoted smoother surface of the pore walls. Hence, the results showed that such porous Si structure could be used as a better substrate for the subsequent layer, in particular for the growth of cubic material.
format	Article
author	M.E.A., Samsudin M., Ikram Md Taib N., Zainal R., Radzali S., Yaakob Z., Hassan
spellingShingle	M.E.A., Samsudin M., Ikram Md Taib N., Zainal R., Radzali S., Yaakob Z., Hassan Preparation of porous Si (100) for overgrown cubic layer: morphological investigation
author_facet	M.E.A., Samsudin M., Ikram Md Taib N., Zainal R., Radzali S., Yaakob Z., Hassan
author_sort	M.E.A., Samsudin
title	Preparation of porous Si (100) for overgrown cubic layer: morphological investigation
title_short	Preparation of porous Si (100) for overgrown cubic layer: morphological investigation
title_full	Preparation of porous Si (100) for overgrown cubic layer: morphological investigation
title_fullStr	Preparation of porous Si (100) for overgrown cubic layer: morphological investigation
title_full_unstemmed	Preparation of porous Si (100) for overgrown cubic layer: morphological investigation
title_sort	preparation of porous si (100) for overgrown cubic layer: morphological investigation
publisher	Universiti Kebangsaan Malaysia
publishDate	2013
url	http://journalarticle.ukm.my/6477/ http://journalarticle.ukm.my/6477/ http://journalarticle.ukm.my/6477/1/18_M.E.A._Samsudin.pdf
first_indexed	2023-09-18T19:47:02Z
last_indexed	2023-09-18T19:47:02Z
_version_	1777405968768827392

Preparation of porous Si (100) for overgrown cubic layer: morphological investigation

Similar Items