Effect of TMAH etching duration on the formation of silicon nanowire transistor patterned by AFM nanolithography
Atomic force microscopy (AFM) lithography was applied to produce nanoscale pattern for silicon nanowire transistor fabrication. This technique takes advantage of imaging facility of AFM and the ability of probe movement controlling over the sample surface to create nanopatterns. A conductive AFM tip...
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Universiti Kebangsaan Malaysia
2012
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| Online Access: | http://journalarticle.ukm.my/5425/ http://journalarticle.ukm.my/5425/ http://journalarticle.ukm.my/5425/1/13%2520Sabar.pdf |
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ukm-54252016-12-14T06:38:25Z http://journalarticle.ukm.my/5425/ Effect of TMAH etching duration on the formation of silicon nanowire transistor patterned by AFM nanolithography Sabar Hutagalung, D. Kam Lew, C. Atomic force microscopy (AFM) lithography was applied to produce nanoscale pattern for silicon nanowire transistor fabrication. This technique takes advantage of imaging facility of AFM and the ability of probe movement controlling over the sample surface to create nanopatterns. A conductive AFM tip was used to grow the silicon oxide nanopatterns on silicon on insulator (SOI) wafer. The applied tip-sample voltage and writing speed were well controlled in order to form pre-designed silicon oxide nanowire transistor structures. The effect of tetra methyl ammonium hydroxide (TMAH) etching duration on the oxide covered silicon nanowire transistor structure has been investigated. A completed silicon nanowire transistor was obtained by removing the oxide layer via hydrofluoric acid etching process. The fabricated silicon nanowire transistor consists of a silicon nanowire that acts as a channel with source and drain pads. A lateral gate pad with a nanowire head was fabricated very close to the channel in the formation of transistor structures. Universiti Kebangsaan Malaysia 2012-08 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/5425/1/13%2520Sabar.pdf Sabar Hutagalung, D. and Kam Lew, C. (2012) Effect of TMAH etching duration on the formation of silicon nanowire transistor patterned by AFM nanolithography. Sains Malaysiana, 41 (8). pp. 1023-1028. ISSN 0126-6039 http://www.ukm.my/jsm/ |
| repository_type |
Digital Repository |
| institution_category |
Local University |
| institution |
Universiti Kebangasaan Malaysia |
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UKM Institutional Repository |
| collection |
Online Access |
| language |
English |
| description |
Atomic force microscopy (AFM) lithography was applied to produce nanoscale pattern for silicon nanowire transistor fabrication. This technique takes advantage of imaging facility of AFM and the ability of probe movement controlling over the sample surface to create nanopatterns. A conductive AFM tip was used to grow the silicon oxide nanopatterns on silicon on insulator (SOI) wafer. The applied tip-sample voltage and writing speed were well controlled in order to form pre-designed silicon oxide nanowire transistor structures. The effect of tetra methyl ammonium hydroxide (TMAH) etching duration on the oxide covered silicon nanowire transistor structure has been investigated. A completed silicon nanowire transistor was obtained by removing the oxide layer via hydrofluoric acid etching process. The fabricated silicon nanowire transistor consists of a silicon nanowire that acts as a channel with source and drain pads. A lateral gate pad with a nanowire head was fabricated very close to the channel in the formation of transistor structures. |
| format |
Article |
| author |
Sabar Hutagalung, D. Kam Lew, C. |
| spellingShingle |
Sabar Hutagalung, D. Kam Lew, C. Effect of TMAH etching duration on the formation of silicon nanowire transistor patterned by AFM nanolithography |
| author_facet |
Sabar Hutagalung, D. Kam Lew, C. |
| author_sort |
Sabar Hutagalung, D. |
| title |
Effect of TMAH etching duration on the formation of silicon nanowire transistor patterned by AFM nanolithography |
| title_short |
Effect of TMAH etching duration on the formation of silicon nanowire transistor patterned by AFM nanolithography |
| title_full |
Effect of TMAH etching duration on the formation of silicon nanowire transistor patterned by AFM nanolithography |
| title_fullStr |
Effect of TMAH etching duration on the formation of silicon nanowire transistor patterned by AFM nanolithography |
| title_full_unstemmed |
Effect of TMAH etching duration on the formation of silicon nanowire transistor patterned by AFM nanolithography |
| title_sort |
effect of tmah etching duration on the formation of silicon nanowire transistor patterned by afm nanolithography |
| publisher |
Universiti Kebangsaan Malaysia |
| publishDate |
2012 |
| url |
http://journalarticle.ukm.my/5425/ http://journalarticle.ukm.my/5425/ http://journalarticle.ukm.my/5425/1/13%2520Sabar.pdf |
| first_indexed |
2023-09-18T19:44:07Z |
| last_indexed |
2023-09-18T19:44:07Z |
| _version_ |
1777405785496616960 |