Fabrication of micromachined uniform microtrench arrays for silicon based filtration membrane

In this paper, we report a uniform microtrench array fabricated on silicon substrate. The proposed system is aimed for the biological molecules separation process via filtration in artificial kidney. The system consists of silicon based membrane having arrays of trench with the dimension of approxim...

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Main Authors:	Kamarul 'Asyikin Mustafa, Burhanuddin Yeop Majlis, Jumril Yunas, Azrul Azlan Hamzah
Format:	Article
Language:	English
Published:	Penerbit Universiti Kebangsaan Malaysia 2019
Online Access:	http://journalarticle.ukm.my/13708/ http://journalarticle.ukm.my/13708/ http://journalarticle.ukm.my/13708/1/03%20Kamarul%20Asyikin%20Mustafa.pdf

id	ukm-13708
recordtype	eprints
spelling	ukm-137082019-11-29T08:55:50Z http://journalarticle.ukm.my/13708/ Fabrication of micromachined uniform microtrench arrays for silicon based filtration membrane Kamarul 'Asyikin Mustafa, Burhanuddin Yeop Majlis, Jumril Yunas, Azrul Azlan Hamzah, In this paper, we report a uniform microtrench array fabricated on silicon substrate. The proposed system is aimed for the biological molecules separation process via filtration in artificial kidney. The system consists of silicon based membrane having arrays of trench with the dimension of approximately 1 μm. The fabrication of the trenches is following standard silicon MEMS process with additional surface modification of the fabricated trench by using thermal oxidation process. The result shows that trench patterns having size of 1~2 μm have been produced. The thermal oxidation process shows that the trench size could be reduced up to 50%. The study will be beneficial for the development of silicon membrane with uniform microtrench arrays for application in filtration of blood cell from other solutes based on molecule size. When the microtrench is etched through the silicon membrane, a filtration membrane is then formed. The separation of solutes will be better due to the uniform size of microtrench. Penerbit Universiti Kebangsaan Malaysia 2019-06 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/13708/1/03%20Kamarul%20Asyikin%20Mustafa.pdf Kamarul 'Asyikin Mustafa, and Burhanuddin Yeop Majlis, and Jumril Yunas, and Azrul Azlan Hamzah, (2019) Fabrication of micromachined uniform microtrench arrays for silicon based filtration membrane. Sains Malaysiana, 48 (6). pp. 1171-1178. ISSN 0126-6039 http://www.ukm.my/jsm/malay_journals/jilid48bil6_2019/KandunganJilid48Bil6_2019.html
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Kebangasaan Malaysia
building	UKM Institutional Repository
collection	Online Access
language	English
description	In this paper, we report a uniform microtrench array fabricated on silicon substrate. The proposed system is aimed for the biological molecules separation process via filtration in artificial kidney. The system consists of silicon based membrane having arrays of trench with the dimension of approximately 1 μm. The fabrication of the trenches is following standard silicon MEMS process with additional surface modification of the fabricated trench by using thermal oxidation process. The result shows that trench patterns having size of 1~2 μm have been produced. The thermal oxidation process shows that the trench size could be reduced up to 50%. The study will be beneficial for the development of silicon membrane with uniform microtrench arrays for application in filtration of blood cell from other solutes based on molecule size. When the microtrench is etched through the silicon membrane, a filtration membrane is then formed. The separation of solutes will be better due to the uniform size of microtrench.
format	Article
author	Kamarul 'Asyikin Mustafa, Burhanuddin Yeop Majlis, Jumril Yunas, Azrul Azlan Hamzah,
spellingShingle	Kamarul 'Asyikin Mustafa, Burhanuddin Yeop Majlis, Jumril Yunas, Azrul Azlan Hamzah, Fabrication of micromachined uniform microtrench arrays for silicon based filtration membrane
author_facet	Kamarul 'Asyikin Mustafa, Burhanuddin Yeop Majlis, Jumril Yunas, Azrul Azlan Hamzah,
author_sort	Kamarul 'Asyikin Mustafa,
title	Fabrication of micromachined uniform microtrench arrays for silicon based filtration membrane
title_short	Fabrication of micromachined uniform microtrench arrays for silicon based filtration membrane
title_full	Fabrication of micromachined uniform microtrench arrays for silicon based filtration membrane
title_fullStr	Fabrication of micromachined uniform microtrench arrays for silicon based filtration membrane
title_full_unstemmed	Fabrication of micromachined uniform microtrench arrays for silicon based filtration membrane
title_sort	fabrication of micromachined uniform microtrench arrays for silicon based filtration membrane
publisher	Penerbit Universiti Kebangsaan Malaysia
publishDate	2019
url	http://journalarticle.ukm.my/13708/ http://journalarticle.ukm.my/13708/ http://journalarticle.ukm.my/13708/1/03%20Kamarul%20Asyikin%20Mustafa.pdf
first_indexed	2023-09-18T20:05:27Z
last_indexed	2023-09-18T20:05:27Z
_version_	1777407128130027520

Fabrication of micromachined uniform microtrench arrays for silicon based filtration membrane

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