The fabrication and evaluation of on-chip gas pressure sensors
In this paper we describe the fabrication and evaluation of on-chip silicon-based gas pressure sensors. The sensor is fabricated using standard Integrated Circuit (IC) fabrication technology except the final etching to delineate cantilever beams. The beam which is the key element in the sensor sy...
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| Format: | Article |
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1990
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| Online Access: | http://journalarticle.ukm.my/1288/ http://journalarticle.ukm.my/1288/ |