Characterization of a-CNx Thin Films prepared by RF-PECVD Technique for humidity sensor

In this work, amorphous carbon nitride (a-CNx) thin films were deposited by radio frequency (RF) plasma enhanced chemical vapor deposition (RF-PECVD) technique. The RF power and gas mixture of methane (CH4) and nitrogen (N2) flow was kept constant, while the electrode distance was varied from 1 to 6...

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Main Authors:	R. Awang, N.F.H Aziz, N. Purhanudin, Z. Zalita
Format:	Article
Language:	English
Published:	Penerbit Universiti Kebangsaan Malaysia 2017
Online Access:	http://journalarticle.ukm.my/10723/ http://journalarticle.ukm.my/10723/ http://journalarticle.ukm.my/10723/1/20%20R.%20Awang%20.pdf

id	ukm-10723
recordtype	eprints
spelling	ukm-107232017-10-07T14:51:07Z http://journalarticle.ukm.my/10723/ Characterization of a-CNx Thin Films prepared by RF-PECVD Technique for humidity sensor R. Awang, N.F.H Aziz, N. Purhanudin, Z. Zalita, In this work, amorphous carbon nitride (a-CNx) thin films were deposited by radio frequency (RF) plasma enhanced chemical vapor deposition (RF-PECVD) technique. The RF power and gas mixture of methane (CH4) and nitrogen (N2) flow was kept constant, while the electrode distance was varied from 1 to 6 cm. The effect of electrode distance on the chemical bonding, morphology and humidity sensing responses of the films were investigated. Fourier transform infra-red spectroscopy (FTIR) studies showed a systematic change in the spectra and showed three main peaks namely the G and D-peak, C≡N triple bonds and C-H/O-H groups. Uniform and porous morphology was observed for films deposited at smallest distance followed by non-porous cubicle-like grain as electrode distance increased. Subsequently formation of vertically aligned nanostructures apparent both from its surface and cross section images by increasing of electrode distance to the fullest. The humidity sensing property has been studied by recording their resistance response to relative humidity (RH) at room temperature. It was found that the resistance value decreases from 15.4 to 3.6 kΩ with the increase in RH from 9 to 85%, with the highest sensitivity of 77% for film deposited at smallest distance of 1 cm. Penerbit Universiti Kebangsaan Malaysia 2017-03 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/10723/1/20%20R.%20Awang%20.pdf R. Awang, and N.F.H Aziz, and N. Purhanudin, and Z. Zalita, (2017) Characterization of a-CNx Thin Films prepared by RF-PECVD Technique for humidity sensor. Sains Malaysiana, 46 (3). pp. 509-514. ISSN 0126-6039 http://www.ukm.my/jsm/english_journals/vol46num3_2017/contentsVol46num3_2017.html
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Kebangasaan Malaysia
building	UKM Institutional Repository
collection	Online Access
language	English
description	In this work, amorphous carbon nitride (a-CNx) thin films were deposited by radio frequency (RF) plasma enhanced chemical vapor deposition (RF-PECVD) technique. The RF power and gas mixture of methane (CH4) and nitrogen (N2) flow was kept constant, while the electrode distance was varied from 1 to 6 cm. The effect of electrode distance on the chemical bonding, morphology and humidity sensing responses of the films were investigated. Fourier transform infra-red spectroscopy (FTIR) studies showed a systematic change in the spectra and showed three main peaks namely the G and D-peak, C≡N triple bonds and C-H/O-H groups. Uniform and porous morphology was observed for films deposited at smallest distance followed by non-porous cubicle-like grain as electrode distance increased. Subsequently formation of vertically aligned nanostructures apparent both from its surface and cross section images by increasing of electrode distance to the fullest. The humidity sensing property has been studied by recording their resistance response to relative humidity (RH) at room temperature. It was found that the resistance value decreases from 15.4 to 3.6 kΩ with the increase in RH from 9 to 85%, with the highest sensitivity of 77% for film deposited at smallest distance of 1 cm.
format	Article
author	R. Awang, N.F.H Aziz, N. Purhanudin, Z. Zalita,
spellingShingle	R. Awang, N.F.H Aziz, N. Purhanudin, Z. Zalita, Characterization of a-CNx Thin Films prepared by RF-PECVD Technique for humidity sensor
author_facet	R. Awang, N.F.H Aziz, N. Purhanudin, Z. Zalita,
author_sort	R. Awang,
title	Characterization of a-CNx Thin Films prepared by RF-PECVD Technique for humidity sensor
title_short	Characterization of a-CNx Thin Films prepared by RF-PECVD Technique for humidity sensor
title_full	Characterization of a-CNx Thin Films prepared by RF-PECVD Technique for humidity sensor
title_fullStr	Characterization of a-CNx Thin Films prepared by RF-PECVD Technique for humidity sensor
title_full_unstemmed	Characterization of a-CNx Thin Films prepared by RF-PECVD Technique for humidity sensor
title_sort	characterization of a-cnx thin films prepared by rf-pecvd technique for humidity sensor
publisher	Penerbit Universiti Kebangsaan Malaysia
publishDate	2017
url	http://journalarticle.ukm.my/10723/ http://journalarticle.ukm.my/10723/ http://journalarticle.ukm.my/10723/1/20%20R.%20Awang%20.pdf
first_indexed	2023-09-18T19:58:17Z
last_indexed	2023-09-18T19:58:17Z
_version_	1777406677020049408

Characterization of a-CNx Thin Films prepared by RF-PECVD Technique for humidity sensor

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