Free space microwave characterization of silicon wafers for microelectronic applications / Zaiki Awang, Deepak Kumar Ghodgaonkar and Noor Hasimah Baba
A contactless and non-destructive microwave method has been developed to characterize silicon semiconductor wafers from reflection and transmission measurements made at normal incidence using MNDT. The measurement system consists of a pair of spot-focusing horn lens antenna, mode transitions, coaxia...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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Institute of Research, Development and Commercialisation (IRDC)
2005
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| Online Access: | http://ir.uitm.edu.my/id/eprint/12806/ http://ir.uitm.edu.my/id/eprint/12806/1/AJ_ZAIKI%20AWANG%20SRJ%2005%201.pdf |