Free space microwave characterization of silicon wafers for microelectronic applications / Zaiki Awang, Deepak Kumar Ghodgaonkar and Noor Hasimah Baba

Free space microwave characterization of silicon wafers for microelectronic applications / Zaiki Awang, Deepak Kumar Ghodgaonkar and Noor Hasimah Baba

A contactless and non-destructive microwave method has been developed to characterize silicon semiconductor wafers from reflection and transmission measurements made at normal incidence using MNDT. The measurement system consists of a pair of spot-focusing horn lens antenna, mode transitions, coaxia...

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Bibliographic Details
Main Authors: Awang, Zaiki, Ghodgaonkar, Deepak Kumar, Baba, Noor Hasimah
Format: Article
Language:English
Published: Institute of Research, Development and Commercialisation (IRDC) 2005
Subjects:
Microelectronics
Microwaves. Including microwave circuits
Online Access:http://ir.uitm.edu.my/id/eprint/12806/
http://ir.uitm.edu.my/id/eprint/12806/1/AJ_ZAIKI%20AWANG%20SRJ%2005%201.pdf

Internet

http://ir.uitm.edu.my/id/eprint/12806/
http://ir.uitm.edu.my/id/eprint/12806/1/AJ_ZAIKI%20AWANG%20SRJ%2005%201.pdf

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