Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor

Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor

This paper presents the design and analysis of an integrated oversampling converter with MEMS capacitive sensor. The MEMS capacitive sensor is a comb-drive which provides change in capacitance when change in acceleration is detected. The analog-to-digital converter (ADC) is a first-order 1-bit...

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Main Authors: Ma, Li Ya, Nordin, Anis Nurashikin, Khan, Sheroz
Format: Conference or Workshop Item
Language:English
Published: 2011
Subjects:
TK7885 Computer engineering
Online Access:http://irep.iium.edu.my/9825/
http://irep.iium.edu.my/9825/
http://irep.iium.edu.my/9825/1/Design_and_simulation_of_an_on-chip_oversampling_converter.pdf
id iium-9825
recordtype eprints
spelling iium-98252012-01-12T08:41:47Z http://irep.iium.edu.my/9825/ Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor Ma, Li Ya Nordin, Anis Nurashikin Khan, Sheroz TK7885 Computer engineering This paper presents the design and analysis of an integrated oversampling converter with MEMS capacitive sensor. The MEMS capacitive sensor is a comb-drive which provides change in capacitance when change in acceleration is detected. The analog-to-digital converter (ADC) is a first-order 1-bit sigma-delta (Σ-Δ) converter. Σ-Δ ADCs are suitable for MEMS sensors since their output voltage are in mV and are low frequencies. Both the Σ-Δ ADC and MEMS capacitive sensor were designed in Silterra’s 0.13μm CMOS process. Simulation of the Σ-Δ ADC was conducted using CadenceTM Spectre, while the MEMS sensor was simulated by COMSOL Multiphysics®. Results indicate that the Σ-Δ ADC can process small voltage output of the MEMS sensor and convert it into digital signals satisfactorily. 2011-05-11 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/9825/1/Design_and_simulation_of_an_on-chip_oversampling_converter.pdf Ma, Li Ya and Nordin, Anis Nurashikin and Khan, Sheroz (2011) Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor. In: 2011 IEEE Symposium Design, Test and Packaging of MEMS and MOEMS, 11-13 May 2011, Aix-en-Provence, France. http://cmp.imag.fr/conferences/dtip/dtip2011/
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic TK7885 Computer engineering
spellingShingle TK7885 Computer engineering
Ma, Li Ya
Nordin, Anis Nurashikin
Khan, Sheroz
Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor
description This paper presents the design and analysis of an integrated oversampling converter with MEMS capacitive sensor. The MEMS capacitive sensor is a comb-drive which provides change in capacitance when change in acceleration is detected. The analog-to-digital converter (ADC) is a first-order 1-bit sigma-delta (Σ-Δ) converter. Σ-Δ ADCs are suitable for MEMS sensors since their output voltage are in mV and are low frequencies. Both the Σ-Δ ADC and MEMS capacitive sensor were designed in Silterra’s 0.13μm CMOS process. Simulation of the Σ-Δ ADC was conducted using CadenceTM Spectre, while the MEMS sensor was simulated by COMSOL Multiphysics®. Results indicate that the Σ-Δ ADC can process small voltage output of the MEMS sensor and convert it into digital signals satisfactorily.
format Conference or Workshop Item
author Ma, Li Ya
Nordin, Anis Nurashikin
Khan, Sheroz
author_facet Ma, Li Ya
Nordin, Anis Nurashikin
Khan, Sheroz
author_sort Ma, Li Ya
title Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor
title_short Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor
title_full Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor
title_fullStr Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor
title_full_unstemmed Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor
title_sort design and simulation of an on-chip oversampling converter with a cmos-mems differential capacitive sensor
publishDate 2011
url http://irep.iium.edu.my/9825/
http://irep.iium.edu.my/9825/
http://irep.iium.edu.my/9825/1/Design_and_simulation_of_an_on-chip_oversampling_converter.pdf
first_indexed 2023-09-18T20:19:26Z
last_indexed 2023-09-18T20:19:26Z
_version_ 1777408007711227904

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