Design and simulation of an on-chip oversampling converter with a CMOS-MEMS differential capacitive sensor
This paper presents the design and analysis of an integrated oversampling converter with MEMS capacitive sensor. The MEMS capacitive sensor is a comb-drive which provides change in capacitance when change in acceleration is detected. The analog-to-digital converter (ADC) is a first-order 1-bit...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/9825/ http://irep.iium.edu.my/9825/ http://irep.iium.edu.my/9825/1/Design_and_simulation_of_an_on-chip_oversampling_converter.pdf |
| Summary: | This paper presents the design and analysis of an
integrated oversampling converter with MEMS capacitive
sensor. The MEMS capacitive sensor is a comb-drive which
provides change in capacitance when change in acceleration is
detected. The analog-to-digital converter (ADC) is a first-order
1-bit sigma-delta (Σ-Δ) converter. Σ-Δ ADCs are suitable for
MEMS sensors since their output voltage are in mV and are low
frequencies. Both the Σ-Δ ADC and MEMS capacitive sensor
were designed in Silterra’s 0.13μm CMOS process. Simulation
of the Σ-Δ ADC was conducted using CadenceTM Spectre, while
the MEMS sensor was simulated by COMSOL Multiphysics®.
Results indicate that the Σ-Δ ADC can process small voltage
output of the MEMS sensor and convert it into digital signals
satisfactorily. |
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