An experimental study on precision grinding of silicon using diamond grinding pins

Silicon substrates are difficult to grind to good surface finishes using conventional machining. Ductile mode machining is often required to have flawless machining but this requires the use of expensive machine tools. However, precision grinding using conventional machine tools could generate large...

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Main Authors:	Alao, Abdur-Rasheed, Konneh, Mohamed
Format:	Article
Language:	English
Published:	Inderscience Enterprises Ltd. 2011
Subjects:	TJ1125 Machine shops and machine shop practice
Online Access:	http://irep.iium.edu.my/7723/ http://irep.iium.edu.my/7723/ http://irep.iium.edu.my/7723/ http://irep.iium.edu.my/7723/1/IJMatEI0203-0410_ALAO.pdf

id	iium-7723
recordtype	eprints
spelling	iium-77232020-01-08T07:35:27Z http://irep.iium.edu.my/7723/ An experimental study on precision grinding of silicon using diamond grinding pins Alao, Abdur-Rasheed Konneh, Mohamed TJ1125 Machine shops and machine shop practice Silicon substrates are difficult to grind to good surface finishes using conventional machining. Ductile mode machining is often required to have flawless machining but this requires the use of expensive machine tools. However, precision grinding using conventional machine tools could generate large amounts of ductile streaks on ground silicon surfaces under good machining conditions. High wheel rotation, slow feed rate, small indentations and small grain sizes are the practical requirements to realise precision grinding of silicon. Therefore, this study examines the feasibility of quantitative determination of the criteria to realise precision grinding of silicon on an NC milling machine with factorial experimental design. The result shows massive ductile streaks at depth of cut, 20 μm; feed rate, 6.25 mm/min and spindle speed of 70,000 rpm with a 43 nm Ra. Spindle speed affects mostly the surface finish. The combined effects of depth of cut and feed rate on Ra and Rt which add to the complexity in the precision grinding process are investigated. Inderscience Enterprises Ltd. 2011 Article PeerReviewed application/pdf en http://irep.iium.edu.my/7723/1/IJMatEI0203-0410_ALAO.pdf Alao, Abdur-Rasheed and Konneh, Mohamed (2011) An experimental study on precision grinding of silicon using diamond grinding pins. International Journal Materials Engineering Innovation (IJMATEI), 2 (3-4). pp. 325-345. ISSN 1757-2754 E-ISSN 1757-2762 http://www.inderscience.com/search/index.php?action=record&rec_id=42885 10.1504/IJMATEI.2011.042885
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TJ1125 Machine shops and machine shop practice
spellingShingle	TJ1125 Machine shops and machine shop practice Alao, Abdur-Rasheed Konneh, Mohamed An experimental study on precision grinding of silicon using diamond grinding pins
description	Silicon substrates are difficult to grind to good surface finishes using conventional machining. Ductile mode machining is often required to have flawless machining but this requires the use of expensive machine tools. However, precision grinding using conventional machine tools could generate large amounts of ductile streaks on ground silicon surfaces under good machining conditions. High wheel rotation, slow feed rate, small indentations and small grain sizes are the practical requirements to realise precision grinding of silicon. Therefore, this study examines the feasibility of quantitative determination of the criteria to realise precision grinding of silicon on an NC milling machine with factorial experimental design. The result shows massive ductile streaks at depth of cut, 20 μm; feed rate, 6.25 mm/min and spindle speed of 70,000 rpm with a 43 nm Ra. Spindle speed affects mostly the surface finish. The combined effects of depth of cut and feed rate on Ra and Rt which add to the complexity in the precision grinding process are investigated.
format	Article
author	Alao, Abdur-Rasheed Konneh, Mohamed
author_facet	Alao, Abdur-Rasheed Konneh, Mohamed
author_sort	Alao, Abdur-Rasheed
title	An experimental study on precision grinding of silicon using diamond grinding pins
title_short	An experimental study on precision grinding of silicon using diamond grinding pins
title_full	An experimental study on precision grinding of silicon using diamond grinding pins
title_fullStr	An experimental study on precision grinding of silicon using diamond grinding pins
title_full_unstemmed	An experimental study on precision grinding of silicon using diamond grinding pins
title_sort	experimental study on precision grinding of silicon using diamond grinding pins
publisher	Inderscience Enterprises Ltd.
publishDate	2011
url	http://irep.iium.edu.my/7723/ http://irep.iium.edu.my/7723/ http://irep.iium.edu.my/7723/ http://irep.iium.edu.my/7723/1/IJMatEI0203-0410_ALAO.pdf
first_indexed	2023-09-18T20:17:15Z
last_indexed	2023-09-18T20:17:15Z
_version_	1777407869656760320

An experimental study on precision grinding of silicon using diamond grinding pins

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