Simulation and fabrication of micro magnetometer using flip-chip bonding technique
Magnetic field detection has been widely accepted in many applications such as military systems, outer space exploration and even in medical diagnosis and treatment. Low magnetic field detection is particularly important in tracking of magnetic markers in digestive tracks or blood vessels. The pr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Conference or Workshop Item |
| Language: | English English |
| Published: |
Springer Nature Singapore Pte Ltd.
2019
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/73199/ http://irep.iium.edu.my/73199/ http://irep.iium.edu.my/73199/ http://irep.iium.edu.my/73199/1/73199_Simulation%20and%20fabrication%20of%20micro%20magnetometer.pdf http://irep.iium.edu.my/73199/7/73199_Simulation%20and%20fabrication%20of%20micro%20magnetometer%20using%20flip-chip%20bonding%20technique_scopus.pdf |
| Summary: | Magnetic field detection has been widely accepted in many applications
such as military systems, outer space exploration and even in medical diagnosis
and treatment. Low magnetic field detection is particularly important in
tracking of magnetic markers in digestive tracks or blood vessels. The presence
of magnetic fields’ strength and direction can be detected by a device known as
magnetometer. A magnetometer that is durable, room temperature operation
and having non-movable components is chooses for this project. Traditional
magnetometer tends to be bulky that hinders its inclusion into micro-scaled environment.
This concern has brought the magnetometer into the trend of device
miniaturization. Miniaturized magnetometer is usually fabricated using conventional
microfabrication method particularly surface micromachining in which
micro structures are built level by level starting from the surface of substrates
upwards until completion of final structure. Although the miniaturization of
magnetometer has been widely researched and studied, the process however is
not. Thus, the process governing the fabrication technique is studied in this paper.
Conventional method of fabrication is known as surface micromachining.
Besides time consuming, this method requires many consecutive steps in fabrication
process and careful alignment of patterns on every layer which increase
the complexity. Hence, studies are done to improve time consuming and reliability
of the microfabrication process. The objective of this research includes
designing micro scale magnetometer and complete device fabrication processes.
A micro-scale search coil magnetometer of 15 windings with 600μm thickness
of wire and 300μm distance between each wire has been designed. |
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