Finite element simulation of MEMS piezoelectric energy scavenger based on pzt thin film

Vibration energy harvesting has been progressively developed in the advancement of technology and widely used by a lot of researchers around the world. There is a very high demand for energy scavenging around the world due to it being cheaper in price, possibly miniaturized within a system, long...

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Main Authors:	Md Ralib @ Md Raghib, Aliza 'Aini, Zulfakher, Nur Wafa Asyiqin, Ab Rahim, Rosminazuin, Za'bah, Nor Farahidah, Mohamad Hanif, Noor Hazrin Hany
Format:	Article
Language:	English English English
Published:	IIUM Press, International Islamic University Malaysia 2019
Subjects:	TP Chemical technology TP155 Chemical engineering
Online Access:	http://irep.iium.edu.my/72539/ http://irep.iium.edu.my/72539/ http://irep.iium.edu.my/72539/ http://irep.iium.edu.my/72539/1/72539_Finite%20element%20simulation.pdf http://irep.iium.edu.my/72539/7/72539_Finite%20element%20simulation%20of%20mems_scopus.pdf http://irep.iium.edu.my/72539/8/72539_FINITE%20ELEMENT%20SIMULATION%20OF%20MEMS%20PIEZOELECTRIC%20ENERGY%20SCAVENGER%20BASED%20ON%20PZT%20THIN%20FILM_WOS.pdf

id	iium-72539
recordtype	eprints
spelling	iium-725392019-11-24T16:06:43Z http://irep.iium.edu.my/72539/ Finite element simulation of MEMS piezoelectric energy scavenger based on pzt thin film Md Ralib @ Md Raghib, Aliza 'Aini Zulfakher, Nur Wafa Asyiqin Ab Rahim, Rosminazuin Za'bah, Nor Farahidah Mohamad Hanif, Noor Hazrin Hany TP Chemical technology TP155 Chemical engineering Vibration energy harvesting has been progressively developed in the advancement of technology and widely used by a lot of researchers around the world. There is a very high demand for energy scavenging around the world due to it being cheaper in price, possibly miniaturized within a system, long lasting, and environmentally friendly. The conventional battery is hazardous to the environment and has a shorter operating lifespan. Therefore, ambient vibration energy serves as an alternative that can replace the battery because it can be integrated and compatible to micro-electromechanical systems. This paper presents the design and analysis of a MEMS piezoelectric energy harvester, which is a vibration energy harvesting type. The energy harvester was formed using Lead Zicronate Titanate (PZT-5A) as the piezoelectric thin film, silicon as the substrate layer and structural steel as the electrode layer. The resonance frequency will provide the maximum output power, maximum output voltage and maximum displacement of vibration. The operating mode also plays an important role to generate larger output voltage with less displacement of cantilever. Some designs also have been studied by varying height and length of piezoelectric materials. Hence, this project will demonstrate the simulation of a MEMS piezoelectric device for a low power electronic performance. Simulation results show PZT-5A piezoelectric energy with a length of 31 mm and height of 0.16 mm generates maximum output voltage of 7.435 V and maximum output power of 2.30 mW at the resonance frequency of 40 Hz. IIUM Press, International Islamic University Malaysia 2019-06-01 Article PeerReviewed application/pdf en http://irep.iium.edu.my/72539/1/72539_Finite%20element%20simulation.pdf application/pdf en http://irep.iium.edu.my/72539/7/72539_Finite%20element%20simulation%20of%20mems_scopus.pdf application/pdf en http://irep.iium.edu.my/72539/8/72539_FINITE%20ELEMENT%20SIMULATION%20OF%20MEMS%20PIEZOELECTRIC%20ENERGY%20SCAVENGER%20BASED%20ON%20PZT%20THIN%20FILM_WOS.pdf Md Ralib @ Md Raghib, Aliza 'Aini and Zulfakher, Nur Wafa Asyiqin and Ab Rahim, Rosminazuin and Za'bah, Nor Farahidah and Mohamad Hanif, Noor Hazrin Hany (2019) Finite element simulation of MEMS piezoelectric energy scavenger based on pzt thin film. IIUM Engineering Journal, 20 (1). pp. 90-99. ISSN 1511-788X E-ISSN 2289-7860 https://journals.iium.edu.my/ejournal/index.php/iiumej/article/view/991 https://doi.org/10.31436/iiumej.v20i1.991
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English English English
topic	TP Chemical technology TP155 Chemical engineering
spellingShingle	TP Chemical technology TP155 Chemical engineering Md Ralib @ Md Raghib, Aliza 'Aini Zulfakher, Nur Wafa Asyiqin Ab Rahim, Rosminazuin Za'bah, Nor Farahidah Mohamad Hanif, Noor Hazrin Hany Finite element simulation of MEMS piezoelectric energy scavenger based on pzt thin film
description	Vibration energy harvesting has been progressively developed in the advancement of technology and widely used by a lot of researchers around the world. There is a very high demand for energy scavenging around the world due to it being cheaper in price, possibly miniaturized within a system, long lasting, and environmentally friendly. The conventional battery is hazardous to the environment and has a shorter operating lifespan. Therefore, ambient vibration energy serves as an alternative that can replace the battery because it can be integrated and compatible to micro-electromechanical systems. This paper presents the design and analysis of a MEMS piezoelectric energy harvester, which is a vibration energy harvesting type. The energy harvester was formed using Lead Zicronate Titanate (PZT-5A) as the piezoelectric thin film, silicon as the substrate layer and structural steel as the electrode layer. The resonance frequency will provide the maximum output power, maximum output voltage and maximum displacement of vibration. The operating mode also plays an important role to generate larger output voltage with less displacement of cantilever. Some designs also have been studied by varying height and length of piezoelectric materials. Hence, this project will demonstrate the simulation of a MEMS piezoelectric device for a low power electronic performance. Simulation results show PZT-5A piezoelectric energy with a length of 31 mm and height of 0.16 mm generates maximum output voltage of 7.435 V and maximum output power of 2.30 mW at the resonance frequency of 40 Hz.
format	Article
author	Md Ralib @ Md Raghib, Aliza 'Aini Zulfakher, Nur Wafa Asyiqin Ab Rahim, Rosminazuin Za'bah, Nor Farahidah Mohamad Hanif, Noor Hazrin Hany
author_facet	Md Ralib @ Md Raghib, Aliza 'Aini Zulfakher, Nur Wafa Asyiqin Ab Rahim, Rosminazuin Za'bah, Nor Farahidah Mohamad Hanif, Noor Hazrin Hany
author_sort	Md Ralib @ Md Raghib, Aliza 'Aini
title	Finite element simulation of MEMS piezoelectric energy scavenger based on pzt thin film
title_short	Finite element simulation of MEMS piezoelectric energy scavenger based on pzt thin film
title_full	Finite element simulation of MEMS piezoelectric energy scavenger based on pzt thin film
title_fullStr	Finite element simulation of MEMS piezoelectric energy scavenger based on pzt thin film
title_full_unstemmed	Finite element simulation of MEMS piezoelectric energy scavenger based on pzt thin film
title_sort	finite element simulation of mems piezoelectric energy scavenger based on pzt thin film
publisher	IIUM Press, International Islamic University Malaysia
publishDate	2019
url	http://irep.iium.edu.my/72539/ http://irep.iium.edu.my/72539/ http://irep.iium.edu.my/72539/ http://irep.iium.edu.my/72539/1/72539_Finite%20element%20simulation.pdf http://irep.iium.edu.my/72539/7/72539_Finite%20element%20simulation%20of%20mems_scopus.pdf http://irep.iium.edu.my/72539/8/72539_FINITE%20ELEMENT%20SIMULATION%20OF%20MEMS%20PIEZOELECTRIC%20ENERGY%20SCAVENGER%20BASED%20ON%20PZT%20THIN%20FILM_WOS.pdf
first_indexed	2023-09-18T21:42:46Z
last_indexed	2023-09-18T21:42:46Z
_version_	1777413250332229632

Finite element simulation of MEMS piezoelectric energy scavenger based on pzt thin film

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