A critical review of the effects of fluid dynamics on graphene growth in atmospheric pressure chemical vapor deposition

Chemical vapor deposition (CVD) of graphene has attracted high interest in the electronics industry due to its potential scalability for large-scale production. However, producing a homogeneous thin-film graphene with minimal defects remains a challenge. Studies of processing parameters, such as g...

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Main Authors:	Fauzi, Fatin Bazilah, Ismail, Edhuan, Ani, Mohd Hanafi, Syed Abu Bakar, Syed Noh, Mohamed, Mohd Ambri, Majlis, Burhanuddin Yeop, Md Din, Muhammad Faiz, Mohd Abid, Mohd Asyadi Azam
Format:	Article
Language:	English English English
Published:	Cambridge University Press 2018
Subjects:	T Technology (General)
Online Access:	http://irep.iium.edu.my/71165/ http://irep.iium.edu.my/71165/ http://irep.iium.edu.my/71165/ http://irep.iium.edu.my/71165/1/71165_A%20critical%20review%20of%20the%20effects%20of%20fluid.pdf http://irep.iium.edu.my/71165/2/71165_A%20critical%20review%20of%20the%20effects%20of%20fluid_SCOPUS.pdf http://irep.iium.edu.my/71165/3/71165_A%20critical%20review%20of%20the%20effects%20of%20fluid_WOS.pdf

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spelling	iium-711652019-07-12T07:10:18Z http://irep.iium.edu.my/71165/ A critical review of the effects of fluid dynamics on graphene growth in atmospheric pressure chemical vapor deposition Fauzi, Fatin Bazilah Ismail, Edhuan Ani, Mohd Hanafi Syed Abu Bakar, Syed Noh Mohamed, Mohd Ambri Majlis, Burhanuddin Yeop Md Din, Muhammad Faiz Mohd Abid, Mohd Asyadi Azam T Technology (General) Chemical vapor deposition (CVD) of graphene has attracted high interest in the electronics industry due to its potential scalability for large-scale production. However, producing a homogeneous thin-film graphene with minimal defects remains a challenge. Studies of processing parameters, such as gas precursors, flow rates, pressures, temperatures, and substrate types, focus on improving the chemical aspect of the deposition. Despite the many reports on such parameters, studies on fluid dynamic aspects also need to be considered since they are crucial factors in scaling up the system for homogenous deposition. Once the deposition kinetics is thoroughly understood, the next vital step is fluid dynamics optimization to design a large-scale system that could deliver the gas uniformly and ensure maximum deposition rate with the desired property. In this review, the influence of fluid dynamics in graphene CVD process was highlighted. The basics and importance of CVD fluid dynamics was introduced. It is understood that the fluid dynamics of gases can be controlled in two ways: via reactor modification and gas composition. This paper begins first with discussions on horizontal tubular reactor modifications. This is followed by mechanical properties of the reactant gasses especially in terms of dimensionless Reynolds number which provides information on gas flow regime for graphene CVD process at atmospheric pressure. Data from the previous literature provide the Reynolds number for various gas compositions and its relation to graphene quality. It has been revealed that hydrogen has a major influence on the fluid dynamic conditions within the CVD, hence affecting the quality of the graphene produced. Focusing on atmospheric pressure CVD, suggestions for up-scaling into larger CVD reactors while maintaining similar fluid properties were also provided. Cambridge University Press 2018 Article PeerReviewed application/pdf en http://irep.iium.edu.my/71165/1/71165_A%20critical%20review%20of%20the%20effects%20of%20fluid.pdf application/pdf en http://irep.iium.edu.my/71165/2/71165_A%20critical%20review%20of%20the%20effects%20of%20fluid_SCOPUS.pdf application/pdf en http://irep.iium.edu.my/71165/3/71165_A%20critical%20review%20of%20the%20effects%20of%20fluid_WOS.pdf Fauzi, Fatin Bazilah and Ismail, Edhuan and Ani, Mohd Hanafi and Syed Abu Bakar, Syed Noh and Mohamed, Mohd Ambri and Majlis, Burhanuddin Yeop and Md Din, Muhammad Faiz and Mohd Abid, Mohd Asyadi Azam (2018) A critical review of the effects of fluid dynamics on graphene growth in atmospheric pressure chemical vapor deposition. Journal of Materials Research, 33 (9). pp. 1088-1108. ISSN 0884-2914 E-ISSN 2044-5326 https://www.cambridge.org/core/journals/journal-of-materials-research/article/critical-review-of-the-effects-of-fluid-dynamics-on-graphene-growth-in-atmospheric-pressure-chemical-vapor-deposition/4375531BA688D44B0755702B50E7C1EA 10.1557/jmr.2018.39
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English English English
topic	T Technology (General)
spellingShingle	T Technology (General) Fauzi, Fatin Bazilah Ismail, Edhuan Ani, Mohd Hanafi Syed Abu Bakar, Syed Noh Mohamed, Mohd Ambri Majlis, Burhanuddin Yeop Md Din, Muhammad Faiz Mohd Abid, Mohd Asyadi Azam A critical review of the effects of fluid dynamics on graphene growth in atmospheric pressure chemical vapor deposition
description	Chemical vapor deposition (CVD) of graphene has attracted high interest in the electronics industry due to its potential scalability for large-scale production. However, producing a homogeneous thin-film graphene with minimal defects remains a challenge. Studies of processing parameters, such as gas precursors, flow rates, pressures, temperatures, and substrate types, focus on improving the chemical aspect of the deposition. Despite the many reports on such parameters, studies on fluid dynamic aspects also need to be considered since they are crucial factors in scaling up the system for homogenous deposition. Once the deposition kinetics is thoroughly understood, the next vital step is fluid dynamics optimization to design a large-scale system that could deliver the gas uniformly and ensure maximum deposition rate with the desired property. In this review, the influence of fluid dynamics in graphene CVD process was highlighted. The basics and importance of CVD fluid dynamics was introduced. It is understood that the fluid dynamics of gases can be controlled in two ways: via reactor modification and gas composition. This paper begins first with discussions on horizontal tubular reactor modifications. This is followed by mechanical properties of the reactant gasses especially in terms of dimensionless Reynolds number which provides information on gas flow regime for graphene CVD process at atmospheric pressure. Data from the previous literature provide the Reynolds number for various gas compositions and its relation to graphene quality. It has been revealed that hydrogen has a major influence on the fluid dynamic conditions within the CVD, hence affecting the quality of the graphene produced. Focusing on atmospheric pressure CVD, suggestions for up-scaling into larger CVD reactors while maintaining similar fluid properties were also provided.
format	Article
author	Fauzi, Fatin Bazilah Ismail, Edhuan Ani, Mohd Hanafi Syed Abu Bakar, Syed Noh Mohamed, Mohd Ambri Majlis, Burhanuddin Yeop Md Din, Muhammad Faiz Mohd Abid, Mohd Asyadi Azam
author_facet	Fauzi, Fatin Bazilah Ismail, Edhuan Ani, Mohd Hanafi Syed Abu Bakar, Syed Noh Mohamed, Mohd Ambri Majlis, Burhanuddin Yeop Md Din, Muhammad Faiz Mohd Abid, Mohd Asyadi Azam
author_sort	Fauzi, Fatin Bazilah
title	A critical review of the effects of fluid dynamics on graphene growth in atmospheric pressure chemical vapor deposition
title_short	A critical review of the effects of fluid dynamics on graphene growth in atmospheric pressure chemical vapor deposition
title_full	A critical review of the effects of fluid dynamics on graphene growth in atmospheric pressure chemical vapor deposition
title_fullStr	A critical review of the effects of fluid dynamics on graphene growth in atmospheric pressure chemical vapor deposition
title_full_unstemmed	A critical review of the effects of fluid dynamics on graphene growth in atmospheric pressure chemical vapor deposition
title_sort	critical review of the effects of fluid dynamics on graphene growth in atmospheric pressure chemical vapor deposition
publisher	Cambridge University Press
publishDate	2018
url	http://irep.iium.edu.my/71165/ http://irep.iium.edu.my/71165/ http://irep.iium.edu.my/71165/ http://irep.iium.edu.my/71165/1/71165_A%20critical%20review%20of%20the%20effects%20of%20fluid.pdf http://irep.iium.edu.my/71165/2/71165_A%20critical%20review%20of%20the%20effects%20of%20fluid_SCOPUS.pdf http://irep.iium.edu.my/71165/3/71165_A%20critical%20review%20of%20the%20effects%20of%20fluid_WOS.pdf
first_indexed	2023-09-18T21:41:01Z
last_indexed	2023-09-18T21:41:01Z
_version_	1777413140460339200

A critical review of the effects of fluid dynamics on graphene growth in atmospheric pressure chemical vapor deposition

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