Design and optimization of a MEMS quartz mass sensor array for biosensing

Most commercial quartz crystal microbalance (QCM) sensors are fabricated as a single AT quartz crystal device and are used for biosensor applications. This limits the sensor’s ability to perform detection of multiple targets at a single time. To overcome this we propose in this work, the design,...

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Main Authors:	Zainuddin, Ahmad Anwar, Nordin, Anis Nurashikin, Md Ralib, Aliza Aini, Ab Rahim, Rosminazuin, Khan, Sheroz, Guines, Cyril, Chatras, Matthieu, Pothier, Arnaud
Format:	Conference or Workshop Item
Language:	English English
Published:	Institute of Electrical and Electronics Engineers Inc. 2018
Subjects:	TA168 Systems engineering TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/67267/ http://irep.iium.edu.my/67267/ http://irep.iium.edu.my/67267/ http://irep.iium.edu.my/67267/1/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_complete.pdf http://irep.iium.edu.my/67267/8/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_scopus.pdf

id	iium-67267
recordtype	eprints
spelling	iium-672672018-10-31T08:33:45Z http://irep.iium.edu.my/67267/ Design and optimization of a MEMS quartz mass sensor array for biosensing Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin Md Ralib, Aliza Aini Ab Rahim, Rosminazuin Khan, Sheroz Guines, Cyril Chatras, Matthieu Pothier, Arnaud TA168 Systems engineering TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Most commercial quartz crystal microbalance (QCM) sensors are fabricated as a single AT quartz crystal device and are used for biosensor applications. This limits the sensor’s ability to perform detection of multiple targets at a single time. To overcome this we propose in this work, the design, optimization and simulation of a MEMS quartz mass (QCM) sensor array. A circular mass sensor placed in an array of four sensors with working electrode radius, r = 100ȝm and centre to centre distance between electrodes, s=2.5mm was designed. Based on COMSOL simulations, resonance frequency of 10.40MHz and mass sensitivity of 0.223 Hz.cm2.ng-1 in liquids was obtained. Simulations indicate the best placement of the quadruple MEMS sensors in an array such that their signals do not interfere with each other. Low degradation of resonance frequency up to 40 kHz was observed based on simulation results. Institute of Electrical and Electronics Engineers Inc. 2018-03-09 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/67267/1/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_complete.pdf application/pdf en http://irep.iium.edu.my/67267/8/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_scopus.pdf Zainuddin, Ahmad Anwar and Nordin, Anis Nurashikin and Md Ralib, Aliza Aini and Ab Rahim, Rosminazuin and Khan, Sheroz and Guines, Cyril and Chatras, Matthieu and Pothier, Arnaud (2018) Design and optimization of a MEMS quartz mass sensor array for biosensing. In: 4th IEEE International Conference on Smart Instrumentation, Measurement and Applications, ICSIMA 2017, 28 - 30 November 2017, Putrajaya. https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8311996 10.1109/ICSIMA.2017.8311996
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English English
topic	TA168 Systems engineering TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
spellingShingle	TA168 Systems engineering TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin Md Ralib, Aliza Aini Ab Rahim, Rosminazuin Khan, Sheroz Guines, Cyril Chatras, Matthieu Pothier, Arnaud Design and optimization of a MEMS quartz mass sensor array for biosensing
description	Most commercial quartz crystal microbalance (QCM) sensors are fabricated as a single AT quartz crystal device and are used for biosensor applications. This limits the sensor’s ability to perform detection of multiple targets at a single time. To overcome this we propose in this work, the design, optimization and simulation of a MEMS quartz mass (QCM) sensor array. A circular mass sensor placed in an array of four sensors with working electrode radius, r = 100ȝm and centre to centre distance between electrodes, s=2.5mm was designed. Based on COMSOL simulations, resonance frequency of 10.40MHz and mass sensitivity of 0.223 Hz.cm2.ng-1 in liquids was obtained. Simulations indicate the best placement of the quadruple MEMS sensors in an array such that their signals do not interfere with each other. Low degradation of resonance frequency up to 40 kHz was observed based on simulation results.
format	Conference or Workshop Item
author	Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin Md Ralib, Aliza Aini Ab Rahim, Rosminazuin Khan, Sheroz Guines, Cyril Chatras, Matthieu Pothier, Arnaud
author_facet	Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin Md Ralib, Aliza Aini Ab Rahim, Rosminazuin Khan, Sheroz Guines, Cyril Chatras, Matthieu Pothier, Arnaud
author_sort	Zainuddin, Ahmad Anwar
title	Design and optimization of a MEMS quartz mass sensor array for biosensing
title_short	Design and optimization of a MEMS quartz mass sensor array for biosensing
title_full	Design and optimization of a MEMS quartz mass sensor array for biosensing
title_fullStr	Design and optimization of a MEMS quartz mass sensor array for biosensing
title_full_unstemmed	Design and optimization of a MEMS quartz mass sensor array for biosensing
title_sort	design and optimization of a mems quartz mass sensor array for biosensing
publisher	Institute of Electrical and Electronics Engineers Inc.
publishDate	2018
url	http://irep.iium.edu.my/67267/ http://irep.iium.edu.my/67267/ http://irep.iium.edu.my/67267/ http://irep.iium.edu.my/67267/1/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_complete.pdf http://irep.iium.edu.my/67267/8/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_scopus.pdf
first_indexed	2023-09-18T21:35:31Z
last_indexed	2023-09-18T21:35:31Z
_version_	1777412794740637696

Design and optimization of a MEMS quartz mass sensor array for biosensing

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