Design and optimization of a MEMS quartz mass sensor array for biosensing
Most commercial quartz crystal microbalance (QCM) sensors are fabricated as a single AT quartz crystal device and are used for biosensor applications. This limits the sensor’s ability to perform detection of multiple targets at a single time. To overcome this we propose in this work, the design,...
| Main Authors: | , , , , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English English |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2018
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/67267/ http://irep.iium.edu.my/67267/ http://irep.iium.edu.my/67267/ http://irep.iium.edu.my/67267/1/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_complete.pdf http://irep.iium.edu.my/67267/8/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_scopus.pdf |
| Summary: | Most commercial quartz crystal microbalance
(QCM) sensors are fabricated as a single AT quartz crystal
device and are used for biosensor applications. This limits the
sensor’s ability to perform detection of multiple targets at a
single time. To overcome this we propose in this work, the design,
optimization and simulation of a MEMS quartz mass (QCM)
sensor array. A circular mass sensor placed in an array of four
sensors with working electrode radius, r = 100ȝm and centre to
centre distance between electrodes, s=2.5mm was designed. Based
on COMSOL simulations, resonance frequency of 10.40MHz and
mass sensitivity of 0.223 Hz.cm2.ng-1 in liquids was obtained.
Simulations indicate the best placement of the quadruple MEMS
sensors in an array such that their signals do not interfere with
each other. Low degradation of resonance frequency up to 40
kHz was observed based on simulation results. |
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