RF magnetron sputtered YSZ thin film: Fabrication and characterizations
In order to obtain high ionic conductivity of a solid electrolyte at intermediate temperatures, a very thin dense film is crucial due to its reduced ohmic losses. This work describes the fabrication of yttria-stablized zirconia (8YSZ) thin films using radio frequency (RF) magnetron sputtering method...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2010
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/6720/ http://irep.iium.edu.my/6720/ http://irep.iium.edu.my/6720/1/ICFMD2010_Shahrul.pdf |